Product Description
Matrix 105 Circuit Boards Parts List
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| Part Number | Description | Qty | |
| ***3 | 1000-0003 | TRANSPORT CONTROL PCB | 1 EA |
| ***4 | 0990-13003 | RESISTOR PAC, 4.7K 8 RES | 3 EA |
| ***4 | 0990-13004 | RESISTOE PAC, 22K 8 RES. | 2 EA |
| ***4 | 0990-21001 | CAPACITOR,.OlUF 200 | 31 EA |
| ***4 | 0990-23001 | CAPACITOR,100UF 20V TANT | 3 EA |
| ***4 | 0990-23002 | CAPACITOR, . 22UF 35V TANT | 1 EA |
| ***4 | 0990-42001 | DrODE,IN4005 | 1 EA |
| ***4 | 0990-53001 | TRANSISTOR,2N3904 | 9 EA |
| ***4 | 0990-61001 | IC.,TTL SN74LS244 | 6 EA |
| ***4 | 0990-61003 | IC.,TTL SN74LS32 | 1 EA |
| ***4 | 0990-61004 | IC.,TTL SN74LS273 | 7 EA |
| ***4 | 0990-61005 | IC.,TTL SN74LS138 | 3 EA |
| ***4 | 0990-61008 | IC.,TTL SN74LS245 | 1 EA |
| ***4 | 0990-61010 | IC. ,TTL 8N7 4 LS 08. | 1 EA |
| ***4 | 0990-63001 | MICROPROCESSOR,28420A Z80 | 1 EA |
| ***4 | 0990-83006 | CONNECTOR,37 PIN”DIUSOCKET | 1 EA |
| ***4 | 0990-83011 | HEADER,34 PIN RIGHT ANGLE | 2 EA |
| ***4 | 0990-83012 | CONNECTOR,15 PIN “DII | 3 EA |
| ***4 | 0990-83013 | HEADER, 8 PIN RIGHT ANGLE | 1 EA |
| ***4 | 0990-84016 | CONNECTOR,LATCH LONG | 4 EA |
| ***3 | 1000-0012 | ASBY, RECORDER INTERFACE | 1 EA |
| ***4 | 0990-57001 | OPTO ISOLATOR,COUPLBD | 1 EA |
| ***4 | 0990-83016 | HEADER,10 PIN,RIGHT ANGLE | 1 EA |
| ***4 | 0990-84053 | CONNECTOR, 14 PIN CPC BULK | 1 EA |
| ***3 | 1000-0019 | PCB, TRANSPORT INTERFACE | 1 EA |
| ***4 | 0990-13001 | RESISTOR PAC, 10K 8 RES. | 6 EA |
| ***4 | 0990-13003 | RESISTOR PAC, 4.7K 8 RES | 1 EA |
| ***4 | 0990-14001 | POT,50K HORIZ. | 4 EA |
| ***4 | 0990-21001 | CAPACITOR, 0.01lUF 200 | 25 EA |
| ***4 | 0990-21002 | CAPACITOR 0.001UF 200V | 3 EA |
| ***4 | 0990-21003 | CAPACITOR,0.1UF 200V | 1 EA |
| ***4 | 0990-21004 | CAPACITOR,lOOPF 200V | 1 EA |
| ***4 | 0990-23001 | CAPACITOR,100UF 20V TANT | 3 EA |
| ***4 | 0990-23002 | CAPPACITOR,22UF 35V TANT | 1 EA |
| ***4 | 0990-42001 | DIODE,IN4005 | 2 EA |
| ***4 | 0990-53001 | TRANSISTOR,2N3904 | 4 EA |
| ***4 | 0990-53002 | TRANSISTOR,TIP120 | 3 EA |
| ***4 | 0990-53003 | TRANSISTOR,TIP125 | 3 EA |
| ***4 | 0990-60001 | IC.,CMOS 4052 | 1 EA |
| ***4 | 0990-60002 | IC.,CMOS 4053 | 1 EA |
| ***4 | 0990-64001 | IC.,LH0070H VOLTAGE REG . | 1 EA |
| ***4 | 0990-65001 | IC.,OPAMO,LM324 | 5 EA |
| ***4 | 0990-65002 | IC.,OPAMO,LM339 | 1 EA |
| ***4 | 0990-66001 | IC.,DAC08HP | 1 EA |
| ***4 | 0990-66002 | IC.,AD7521/DAC1222 | 1 EA |
| ***4 | 0990-83005 | HEADER,8 PIN. 156 MTA | 1 EA |
| ***4 | 0990-83007 | CONNECTOR,37 PIN “D” PLUD | 1 EA |
| ***4 | 0990-83008 | CONNECTOR,25 PIN “D” PLUD | 1 EA |
| ***4 | 0990-85026 | INSULATOR,MICA,W/THERMAL | 6 EA |
| ***4 | 0990-90004 | MICROF– USE HOLDER, 5A,125V | 6 EA |
| ***4 | 0990-90009 | MICROF– USE , 3/4A,125V | 6 EA |
| ***4 | 0993-20009 | PLATE,TRANSPORT INTERFACE | 1 EA |
| ***3 | 1000-0041 | PCB, MICROPROCESSOR | 1 EA |
| ***4 | 0990-84050 | JUMPER, 2-PIN CONNECTOR | 2 EA |
| ***4 | 0993-40068 | STANDOFF,6/32X3/8″ ALUM. | 4 EA |
| ***4 | 0995-10504 | ASSY,MICRO!’ROCESSOR PCB | 1 EA |
| ***4 | 0996-10026 | s~T soc~E.T | 1 EA |
| ***4 | 1000-0040 | AS SY, :1,0 5 · T.EMPERATURE | 1 EA |
| ***5 | 0990-21003 | CAPAC:I:TOR,0.1P.f 20.PV | 12 EA |
| ***5 | 0990-22001 | CAPACiiJ:’oR, 10~fD 35V | 2 EA |
| ***5 | 0990-23001 | CAPACITOR, iOOUF 2ov—TANT | 1 EA |
| ***5 | 0990-60012 | I C , I;.J:N~. iu::qEIVER. | 1 EA |
| ***5 | 0990-60013 | IG,LI:tifE I)R-l:VER | 1 EA |
| ***5 | 0990-61008 | IC. , TTL Sl’i74tS245 | 4 EA |
| ***5 | 0990-61015 | IC .. ,TTL SN74LSS6 | 1 EA |
| ***5 | 0990-61019 | IC., T’]:L 74HC393 | 1 EA |
| ***5 | 0990-63003 | IC. ,EPROM | 1 EA |
| ***5 | 0990-63004 | IC. ;~PROM | 1 EA |
| ***5 | 0990-64003 | IC.,VOLTAGE REGULATOR | 1 EA |
| ***5 | 0990-69001 | PLD.l000-0040 ADDRESS | 1 EA |
| ***5 | 0990-83011 | HEADER, 34 PIN RIGHT ANGLE | 1 EA |
| ***5 | 0990-83024 | HEADER,34 PIN | 1 EA |
| ***5 | 0990-83025 | HEADER,26 PIN | 2 EA |
| ***5 | 0990-83027 | HE;ADER, 2 PIN | 1 EA |
| ***5 | 0990-83028 | HEADER, 5 PIN | 1 EA |
| ***5 | 0990-83036 | HEADER, 5 PIN 100 MTA. | 1 EA |
| ***5 | 0990-83037 | HEADER, 2 PIN 10.0 MTA. | 1 EA |
| ***5 | 0990-83051 | HEADER, 9 PIN MTA ·. 10 0 | 4 EA |
| ***5 | 0990-84016 | CONNECTOR, LATCH LONG | 2 EA |
| ***4 | 1070-0118 | CABLE,RS232 INTERCONNECT | 2 EA |
| ***4 | 1070-0119 | CABLE,CPU BUS INTRCONNECT | 1 EA |
| ***4 | 1070-0124 | HARNESS,CPU POWER | lEA |
| ***4 | 1070-0125 | HARNESS,CPU RESET | 1 EA |
| ***3 | 1000-0042 | PCB, OPERATOR INTERFACE | 1 EA |
| ***4 | 0990-13003 | RESISTOR PAC, 4.7K 8 RES | 2 EA |
| ***4 | 0990-13006 | RESISTOR PAC, lOOK 9 RES | 1 EA |
| ***4 | 0990-21001 | CAPACITOR,.Q1UF 200 | 49 EA |
| ***4 | 0990-23001 | CAPACITOR,lOOtJF 20V TANT | 3 EA |
| ***4 | 0990-23002 | CAPACITOR, 22UF 35V TANT | 1 EA |
| ***4 | 0990-53001 | TRAN$-ISTQR,2N3904 | 1 EA |
| ***4 | 0990-53002 | TRANSISTOR,TIP120 | 1 EA |
| ***4 | 0990-53004 | TRANSISTOR,2N3906 | 5 EA |
| ***4 | 0990-60005 | IC., CMOS 4040 | 1 EA |
| ***4 | 0990-61001 | IC.,TTL SN74LS244 | 4 EA |
| ***4 | 0990-61002 | IC.,TTL SN74LS04 | 3 EA |
| ***4 | 0990-61003 | IC.,TTL SN74LS32 | 3 EA |
| ***4 | 0990-61004 | IC.,TTL SN74LS273 | 3 EA |
| ***4 | 0990-61005 | IC.,TTL SN74LS138 | 3 EA |
| ***4 | 0990-61008 | IC.,TTL SN74LS245 | 2 EA |
| ***4 | 0990-61010 | IC.,TTL SN74LS08 | 2 EA |
| ***4 | 0990-61011 | IC.,TTL SN74LS74 | 1 EA |
| ***4 | 0990-61012 | IC.,TTL SN74LS164 | 1 EA |
| ***4 | 0990-61013 | IC.,TTL SN74LS165 | 1 EA |
| ***4 | 0990-61014 | IC.,TTL SN74LS153 | 1 EA |
| ***4 | 0990-61015 | IC.,TTL SN74LS86 | 1 EA |
| ***4 | 0990-61017 | IC.,TTL SN74LS219 | 2 EA |
| ***4 | 0990-62001 | IC., RAM 2114A | 1 EA |
| ***4 | 0990-63001 | MICROPROCESSOR , 28420A Z80 | 1 EA |
| ***4 | 0990-83004 | HEADER,10 PIN 100 MTA. | 1 EA |
| ***4 | 0990-83011 | HEADER,34 PIN RIGHT ANGLE | 1 ElA |
| ***4 | 0990-83013 | HEADER, 8 PIN RIGHT ANGLE | 1 EA |
| ***4 | 0990-83014 | HEADER,26 PIN RIGHT ANGLE | 1 EA |
| ***4 | 0990-83015 | HEADER,20 PIN RIGHT ANGLE | 1 EA |
| ***4 | 0990-83032 | CONNECTOR, 7 PIN .100 | 1 EA |
| ***4 | 0990-84016 | CONNECTOR, LATCH LONG | 8 EA |
| ***3 | 1000-0049 | PCB,PROCESS INTERFACE | 1 EA |
| ***4 | 0990-13001 | RESISTOR PAC, 10K 8 RES | 1 EA |
| ***4 | 0990-13002 | RESISTOR PAC, 2.2K 8 RES. | 4 EA |
| ***4 | 0990-13008 | RESTSTOR PAC, 100 OHM 8 RE | 1 EA |
| ***4 | 0990-14001 | POT,50K HORIZ. | 4 EA |
| ***4 | 0990-21001 | CAPACITOR,.01lUF 200 | 63 EA |
| ***4 | 0990-21005 | CAPACITOR,5600PF 200V | 2 EA |
| ***4 | 0990-23001 | CAPACITOR,100UF 20V TANT | 3 EA |
| ***4 | 0990-23002 | CAPACITOR, 22UF 35V TANT | 1 EA |
| ***4 | 0990-33001 | COIL,100UH | 43 EA |
| ***4 | 0990-42001 | DIODE,IN4005 | 21 EA |
| ***4 | 0990-53001 | TRANSISTOR,2N3904 | 11 EA |
| ***4 | 0990-53002 | TRANSISTOR,TIP120 | 14 EA |
| ***4 | 0990-53007 | TRANSISTOR,MPSA26/27 | 1 EA |
| ***4 | 0990-65001 | IC.,OPAMP,LM324 | 2 EA |
| ***4 | 0990-83001 | HEADER, 6 PIN 100 MTA. | 12 EA |
| ***4 | 0990-83002 | HEADER, 8 PIN 100 MTA. | 4 EA |
| ***4 | 0990-83003 | HEADER, 3 PIN 100 MTA. | 3 EA |
| ***4 | 0990-83004 | HEADER,10 PIN 100 MTA. | 5 EA |
| ***4 | 0990-83005 | HEADER, 8 PIN 156 MTA. | 1 EA |
| ***4 | 0990-83006 | CONNECTOR,37 PIN”D”SOCKET | 1 EA |
| ***4 | 0990-83007 | CONNECTOR,37 PIN “D” PLUG | 1 EA |
| ***3 | 1000-0050 | PCB, PROCESS CONTROL | 1 EA |
| ***4 | 0990-13001 | RESISTOR PAC, 10K 8 RES. | 4 EA |
| ***4 | 0990-13002 | RESISTOR PAC, 2.2K 8 RES. | 1 EA |
| ***4 | 0990-14001 | POT,50K HORIZ. | 12 EA |
| ***4 | 0990-21001 | CAPACITOR,.01UF 200 | 75 EA |
| ***4 | 0990-21003 | CAPACITOR,0.1UF 200V | 5 EA |
| ***4 | 0990-21004 | CAPACITOR,100PF 200V | 7 EA |
| ***4 | 0990-21005 | CAPACITOR,5600PF 200V | 1 E,A |
| ***4 | 0990-21006 | CAPACITOR,27PF 200V | 1 EA |
| ***4 | 0990-21007 | CAPACITOR,2200PF 200V | 2 EA |
| ***4 | 0990-23001 | CAPACITOR,100UF 20V TANT | 3 EA |
| ***4 | 0990-23002 | CAPACITOR, 22UF 35VTANT | 1 EA |
| ***4 | 0990-42002 | DIODE,IN914 | 2 EA |
| ***4 | 0990-53001 | TRANSISTOR,2N3904 | 2 EA |
| ***4 | 0990-53004 | TRANSISTOR,2N3906 | 2 EA |
| ***4 | 0990-60001 | IC. , CMOS 4052 | 2 EA |
| ***4 | 0990-60004 | IC. ,CMOS AD7506 | 1 EA |
| ***4 | 0990-60005 | IC.,CMOS 4040 | 2 EA |
| ***4 | 0990-61001 | IC.,TTLSN74LS244 | 6 EA |
| ***4 | 0990-61002 | IC.,TTL SN74LS04 | 1 EA |
| ***4 | 0990-61003 | IC.,TTL SN74LS32 | 2 EA |
| ***4 | 0990-61004 | IC.,TTLSN74LS273 | 18 EA |
| ***4 | 0990-61005 | IC.,TTL SN74LS138 | 6 EA |
| ***4 | 0990-61008 | IC.,TTL SN74LS245 | 1 EA |
| ***4 | 0990-61009 | IC.,TTL SN74LS259 | 2 EA |
| ***4 | 0990-61010 | Io.,TTL 8N74LS08 | 2 EA |
| ***4 | 0990-61011 | IC.,TTL SN74LS74 | 1 EA |
| ***4 | 0990-64001 | IC.,LH0070H VOLTAGE REG. | 1 EA |
| ***4 | 0990-65001 | IC.,OPAMP,LM324 | 3 EA |
| ***4 | 0990-65003 | IC. OPAMP, LM311 | 1 EA |
| ***4 | 0990-65004 | IC.,OPAMP,LM084 | 4 EA |
| ***4 | 0990-66001 | IC. ,DAC08HP | 1 EA |
| ***4 | 0990-66002 | IC.,AD7521/DAC1222 | 8 EA |
| ***4 | 0990-83006 | CONNECTOR,37 PIN “D” SOCKET | 1 EA |
| ***4 | 0990-83007 | CONNECTOR,47 PIN “D” PLUG | 1 EA |
| ***4 | 0990-83011 | HEADER,34 PIN RIGHT ANGLE | 1 EA |
| ***4 | 0990-83013 | HEADER, 8 PIN RIGHT ANGLE | 1 EA |
| ***4 | 0990-84016 | CONNECTOR, LATCH LONG | 2 EA |
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Please contact us if you need Matrix 105 Spare Parts. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Matrix 105 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 205 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 303 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability | Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range
Matrix 403 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range
Matrix 10X 205 X03
The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.
