Matrix 105 Miscellaneous Main console

Matrix 105 Miscellaneous Main console

Product Description

Matrix 105 Miscellaneous Main console

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  Part Number Description Qty
**3 0990-84040 HOUSING, 3 PIN RECEPTACLE 1 EA
**3 0990-84066 CONNECTOR,25 PIN FILTER 2 EA
**3 0990-88023 TUBING, 1/4″ POLY BRAID 7 IN
**3 0990-89005 CONTACT,20-24 AWG PIN 5 EA
**3 0990-95007 SWITCH,MUSHROOM EMO WITH 1 EA
**3 0990-95009 CAP,WHITE SWITCH 1 EA
**3 0990-95010 LAMP,PUSHBUTTON SWITCH 1 EA
**3 0990-95017 SWITCH, 6A 600V KEYED 1 EA
**3 0990-95020 BLOCK,SWITCH CONTACT 1 EA
**3 0990-95021 SWITCH,DPDT PUSHBUTTON 1 EA
**3 0990-95022 SWI-TCH I 15A 2.5 ov INTERLOCK 3 EA
**3 0990-95026 SWITCH, VACUUM 1 EA
**3 0990-95030 CAP,CPU RESET SWITCH 1 EA
**3 0990-95031 SWITCH,SPST CPU RESET 1 EA
**3 0990-99004 FILTER,MINI IN.,..LINE 1 EA
**3 0992-10066 FRAME,PROCESS MODULE SUPPORT 1 EA
**3 0992-30024 TUBE,FLOW CONTROL/FILTER 1 EA
**3 0992-40039 BLOCK,SPATULA FITTING 1 EA
**3 0992-50003 TUBING, 1/4110DX1/811ID 34 IN
**3 0992-50004 HOSE, 1/8110DX1/16″ID 20 IN
**3 0992-50006 FITTING, HOU_SE EXHAUST 1 EA
**3 0992-70025 ENCLOSURE,RIGHT REAR 1 EA
**3 0992-70050 TUBE,FILTER/BULKHEAD 1 EA
**3 0992-70055 CLAMP,RF GASKET 1 EA
**3 0992-70167 PLATE,D-SUB MIN.CONNECTOR 2 EA
**3 0992-70223 CLAMP, CONDUCTIVE ELASTIC 1 EA
**3 0992-70249 CLAMP, SEAL HINGE 1 EA
**3 0992-80017 BRACKET,WAFER BOAT PLAT 1 EA
**3 0992-80026 BRACKET, SIDE PANEL/ 1 EA
**3 0992-80027 BRACKET, SIDE PANEL/ 1 EA
**3 0992-80040 BRACKET, CARD CAGE MTG 1 EA
**3 0992-80044 BRACKET,PRESSURE. SWITCH 1 EA
**3 0992-80070 BRACkET,MAIN CONSOLE 1 EA
**3 0992-80075 BRACKET, CLAMP MTG. RIGHT 1 EA.
**3 0992-80112 BRACKET,FRONT COVER 1 EA
**3 0992-80167 BRACKET, VALVE ASSY 1 EA
**3 0992-80188 BRKT, CLAMP MTG LEFT 1 EA
**3 0992-80196 BRACKET, PCB MOTOROLA 1 EA
**3 0992-80197 BRACKET, MOUNT GASKET 1 EA
**3 0992-80198 BRACKET; MOUNTING 1 EA
**3 0992-80203 BRACKET, MOUNT AUTOTUNE w/ 1 EA
**3 0992-80207 BRACKET, HINGE RF SEAL 1. EA
**3 0993-00005 COVER,OPERATOR INTERFACE 1 EA
**3 0993-00117 HOUSING, FAN EXHAUST 1 EA
**3 0993-00015 HOUSING,CARD READER & 1 EA
**3 0993-00118 SHIELD,INSULATEDREACTOR 1 EA
**3 0993-10002 OVERLAY,CARD READER MOD 1 EA
**3 0993-10023 LABEL, “CAUTION DO NOT BEND” 1 EA
**3 0993-10040 LABEL, LARGE 3 X 5 1 EA
**3 0993-10044 PANEL, PROC. MOD REAR 105 1 EA
**3 0993-20004 PLATE,ORBBITRAN MOUNTING 2 EA
**3 0993-20013 PLATE;ELEVATOR SUSPENSION 1 EA
**3 0993-20014 PLATE, ELEVATOR SUSPENSION 1 EA
**3 0993-20015 BASEPLATE,ELEVATOR 1 EA
**3 0993-20042 PLATE,FAN CUT-OUT BLANK 1 EA
**3 0993-20056 PLATE,MACHINE BASE 1 EA
**3 0993-20062 PLATE,ELEVATOR REAR STUD 1 EA
**3 0993-20063 PLATE,ELEVATOR FRONT STUD 1 EA
**3 0993-20064 PLATE,WAFER TRANSFER 1 EA
**3 0993-20065 PLATE,WAFER TRANSFER 1 EA
**3 0993-20071 PLATE,CHART RECORDER 1 EA
**3 0993-20085 PANEL,PI PCB MOUNTING 1 EA
**3 0993-20110 PANEL,REAR MAIN 1 EA
**3 0993-20112 CHASSIS,ORBITRAN MTG 1 EA
**3 0993-20197 PLATE,ENDPOINT AIR FLOW 1 EA
**3 0993-40017 FOOT,BASEPLATE LEVELING 4 EA
**3 0994-30031 WASHER SHOULDER NYLON 2 EA
**3 0994-30034 WASHER #10 NYLON 29 EA
**3 0994-40007 STRIP, HOLLOW P CONDUCTIVE 68.75 IN
**3 0994-50001 SCREW, ORBITRAN LEVELING 8 EA
**3 0994-60013 O-RING,VITON 1 EA
**3 0994-70034 PLUG,10-32 MAINIFOLD 1 EA
**3 0994-70042 FITTING,BARBED 6 EA
**3 0994-70048 FITTING “T” 1 EA
**3 0994-70049 FITTING, ADAPTOR 1 EA
**3 0994-70050 FITTING, BULKHEAD 1 EA
**3 0994-70054 GASKET,NICKEL VCR WITH 2 EA
**3 0994-70057 FITTING, BULKHEAD 1 EA
**3 0994-70059 FITTING, “T” 1/8″NPT-10-32 1 EA
**3 0994-70074 FITTING, “T” UNION 1 EA
**3 0994-70096 FITTING,l0-32X l/l6″ ID 8 EA
**3 0994-70099 FITTING,l0-32 MALE UNION 5 EA
**3 0994-70118 CONNECTION, MALE 2 EA
**3 0994-70120 FXTTING, 1/4″ BULKHEAD 2 EA
**3 0994-70132 FITTING, FERRULESS TUBE 1 EA
**3 0994-70142 UNION, BULKHEAD 1/4″ 2 EA
**3 0994-70146 FITTING, FLOW SWITCH 1 EA
**3 0995-10002 ALARM,AUDIBLE 6-28 VDC 1 EA
**3 0995-10501 ORBITRAN, RANDOM ACCESS 1 EA
**3 0995-10507 READER,MAG STRIPE CARD 1 EA
**3 0995-10512 INDEXER,CASSETTE 1 EA
**3 0995-15004 0-RING,KF-40 CENTERING 2 EA
**3 0995-15005 GLAMP,KF40 2 EA
**3 0995-16510 VALVE,24V 2 EA
**3 0995-16519 VALVE,RIGHT ANGLE ISO NC 1 EA
**3 0995-16521 VALVE 1 CLIPPARD 24V LP 1 EA
**3 0995-99702 VALVE,NEEDLE 1 EA
**3 0995-99710 FAN,24VDC lOOCFM 1 EA
**3 0995-99712 VACUUM VALVE, PRESSURE 1 EA
**3 0995-99753 AUTOTUNE, RF SERVICES 1 EA

  

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Please contact us if you need Matrix 105 Spare Parts-Matrix 105 Miscellaneous Main console. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.

 
Matrix 105 Plasma Asher Descum

Matrix 105 Plasma Asher Descum

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range

Plasma Asher Descum - Matrix 205

Matrix 205 Plasma Asher Descum

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range

Matrix 303 Plasma Etch

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability |  Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range

Plasma Etch - Matrix 403

Matrix 403 Plasma Etch

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability |  Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range

Matrix 10X 205 X03

The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.