Product Description
Matrix 105 Gas Pressure Control Assembly
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| Part Number | Description | Qty | |
| **3 | 0101-0369 | ASSY, GAS PRESSURE CONT. 103 | 1 EA |
| ***4 | 0992-50003 | TUBING, 1/4″, OD X 1/8″ ID | 76 IN |
| ***4 | 0992-70215 | PANEL, N2 5 1/4″ 103 FLUSH | 1 EA |
| ***4 | 0994-70111 | FITTING, STRAIGHT MALE | 8 EA |
| ***4 | 0994-70128 | FITTING, MALE ELBOW ONE | 13 EA |
| ***4 | 0994-70150 | FITTING, F TO F 1/8″ NPTF | 4 EA · |
| ***4 | 0995-99709 | REGULATOR I PANEL MOUNTING | 3 EA |
| ***4 | 0995-99748 | MANIFOLD, 1/8″ NPT W/ 4 PORTS | 1 EA |
| ***4 | 0995-99754 | GAUGE;, PRESSURE 30 PSIG | 3 EA |
| ***4 | 0995-99755 | GAUGE, PRESSURE 100 PSIG | 1 EA |
| ***4 | 0995-99757 | REGULATOR, PRESS “A” STRING | 1 EA |
| ***4 | 0995-99772 | GAUGE, 0-60 PSIG SS | 2 EA |
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Please contact us if you need Matrix 105 Spare Parts-Matrix 105 Gas Pressure Control Assembly. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Matrix 105 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 205 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 303 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability | Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range
Matrix 403 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range
Matrix 10X 205 X03
The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.
