Spare Parts for AW-105R Plasma Asher
| Item | Part Number | Description |
|---|---|---|
| 1 | 0990-95010 | Lamp, Pushbutton Switch |
| 2 | 0995-16521 | Solenoid, ETO-3 |
| 3 | 0995-16527 | Solenoid, ET-2M |
| 4 | 0101-0479 | Assy, Bellows Upgrade,including one of 0101-0484, 0992-60149, 0992-40211, 0994-60062AW, 0994-60055 |
| 5 | 0992-60149 | Insulator, Bellows Macor |
| 6 | 0994-60005 | O-Ring, Red Silicone (Door) |
| 7 | 0994-60006 | O-Ring, Red Silicone (Reactor) |
| 8 | 0994-60007 | O-Ring, Red Silicone (Bell Jar) |
| 9 | 0994-60019 | O-Ring, Vacuum Valve |
| 10 | 0994-60029 | O-Ring, Vacuum Valve Poppet |
| 11 | 0994-60050 | O-Ring, Chuck Seal |
| 12 | 0994-60055 | O-Ring Silicone (Lifter Pins) |
| 13 | 0994-60062-AW | O-Ring Kalrez (Lifter Pins) |
| 14 | 0994-60063 | O-Ring Kalrez (Chuck) |
| 15 | 0995-10597 | Cylinder, Pancake |
| 16 | 0992-60094 | Ceramic Ring |
| 17 | 0992-60126 | Insulator, Lower Reactor |
| 18 | 0992-60135 | Pin Wafer Lifting |
| 19 | 0992-60147 | Quartz Chamber |
| 20 | 0992-60253 | Baffle, Quartz Insulated Reactor |
| 21 | 0995-16512 | Bleed Valve |
| 22 | 0995-99777 | Door Cylinder |
| 23 | 0995-99752 | Baratron, 0-10 Torr, VCR 1/2″ |
| 24 | S2100-1008-008 | PCA, Main Control Board |
| 25 | S2100-0105-019 | PCA, Robot Control Board |
| 26 | S2100-0105-010 | PCA, Distribution Board |
| 27 | 0995-99752 | Baratron, 0-10 Torr, VCR 1/2″ |
| 28 | A5-0602-A | Computer Board |
| 29 | A5-0603-A | CF Card, 64G |
| 30 | A5-1021 | Memory, 256M DDR333 200PIN, Non-ECC |
| 31 | 0992-60253-1 | Quartz Baffle,WIN, Matrix 105 |
| 31 | 0992-60253-2 | Quartz Baffle, Matrix 105 |
| 32 | A0992-40515 | Ring, Quartz Baffle MTG. |
| 33 | 994-10087 | SCREW, 1/4″ X 3/16″ SKT |
| 34 | 0993-40109 | Pump Ring, |
| 35 | 025-0146 | Resistive Stylus && Mounted Holder |
| 36 | 023-0142 | Tool, Chamber Holder, Matrix |
| 37 | 013-4000-05A | Robot Teaching Wafer, 3″ |
| 38 | 028-0016-00 | Cassette Stage 4″/6″Cassette, Including 022-0026,023-0153,023-0156,023-0158,025-0047,025-0143,045-0111,053-0040-02,063-0122-01,063-0276-01,0992-70079,FWIN06-SSS,LWIN06-SSS,SCI06C-0375SS,SCI06C-0500SS |
| 39 | 028-0017-00 | Upgrade kits from 6.125″ to 4/6.125″ |
| 40 | 023-0164-02 | Wafer Aligner Positioner 4″/6.125″ |
| 41 | 94-484-001 | RF control cable,ENI |
| 42 | 064-0002 | Ceramic Ring, 4″ |
| 43 | 025-0500 | Robot, 7″Z x 10.5 |
| 44 | 0995-16519 | Valve Right Angle Matrix |
| 45 | 0101-0369 | Assy., Gas Pressure CONT |
| 46 | W01-00012-B | RF Matching Network, Matrix105 |
| 47 | 0101-0351 | ASSY,ORBITRAN MOTOR UPPER |
| 48 | 0992-40375 | Electrode, Full Mesh Group |
| 49 | 0992-70051 | Electrode, Positive |
| 50 | 0992-30034 | Coil, RF Output Inductor |
| 51 | SA5-0602-B | Computer for Matrix 105 and Tegal |
| 52 | 0995-10575 | Orbitran Pot Assembly |
| 53 | 025-0102 | RF Generator,600W, AW-105R,13.56MHz |
| 54 | 0992-40266 | Chamber, 6″ Insulated |
| 55 | 1000-0049 | PCA, Process interface board |
| 56 | 0995-16524 | Isolation Valve,1/2 VCR Male,NC |
| 57 | 0992-30035 | STRAP, GROUND |
| 58 | 023-0127 | Spiral, Hold RF Coil |
| 59 | 29-464-001 | Kit,Fid-upgr Chamber Ground |
| 60 | A5-1021 | Memory, 256M |
Need Parts for Other Equipment?
Allwin21 does its best to provide long-term spare parts support for equipment sold and/or upgraded by Allwin21. For other RTP, plasma asher, plasma etcher, PVD/sputter, metrology, or upgraded legacy equipment, please contact us with the complete equipment and parts information.
For obsolete parts, discontinued components, or unsupported modules, Allwin21 may recommend replacement parts, substitute parts, repair services, upgrade kits, or subsystem modernization solutions to help extend the useful life of the equipment.
Spare Parts Inquiry Form
Please provide the Equipment Model, Equipment LOT ID, Part Number, Part Description, Quantity Required, and Part Photos (if applicable).