Spare Parts for AW-901eR AW-903eR
| Item | Part Number | Description |
|---|---|---|
| 1 | 80-200-342 | Band, Cont, Fem, .125pin, .320L |
| 2 | 99-287-003 | Shuttle Interface Board |
| 3 | S2100-0901-008 | Main control board, Upgrade Kit, Tegal 901e, Tegal 903e |
| 4 | 39-735-005 | 3″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 5 | 39-733-001 | 3″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| 6 | 39-735-001 | 3″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 7 | 39-741-001 | 3″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 8 | 39-927-001 | 3″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 9 | 39-741-005 | 3″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 10 | 39-927-019 | 4″ FA GaAs, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 11 | 39-735-006 | 4″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 12 | 39-733-002 | 4″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| 13 | 39-735-002 | 4″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 14 | 39-741-002 | 4″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 15 | 39-927-002 | 4″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 16 | 39-741-011 | 4″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 17 | 39-927-006 | 4″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 18 | 39-735-007 | 5″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 19 | 39-733-003 | 5″, Tegal 901e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 20 | 39-735-003 | 5″, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 21 | 39-733-003 | 5″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| 22 | 39-735-003 | 5″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 23 | 39-741-003 | 5″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 24 | 39-927-003 | 5″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 25 | 39-741-010 | 5″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 26 | 39-927-007 | 5″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 27 | 39-735-020 | 6″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 28 | 39-733-004 | 6″, Tegal 901e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 29 | 39-735-020 | 6″, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 30 | 39-733-007 | 6″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| 31 | 39-735-019 | 6″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 32 | 39-741-025 | 6″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 33 | 39-927-020 | 6″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 34 | 39-741-026 | 6″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 35 | 39-927-021 | 6″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 36 | 39-927-009 | Motorola Special, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 37 | 39-741-024 | Read Rite SQR, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| 38 | 39-741-019 | Rectangle, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| 39 | 39-627-003 | Centering Ring, 4″-AL, Tegal 901e Plasma Etcher |
| 40 | 39-627-004 | Centering Ring, 5″-AL, Tegal 901e Plasma Etcher |
| 41 | 39-627-002 | Centering Ring, 6″-AL, Tegal 901e Plasma Etcher |
| 42 | 40-294-003 | Centering Ring, 4″-AL, Tegal 903e Plasma Etcher |
| 43 | 40-295-003 | Centering Ring, 5″-AL, Tegal 903e Plasma Etcher |
| 44 | 40-306-002 | Centering Ring, 6″-AL, Tegal 903e Plasma Etcher |
| 45 | 40-395-004 | Centering Ring, 3″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| 46 | 40-395-003 | Centering Ring, 4″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| 47 | 40-395-002 | Centering Ring, 5″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| 48 | 40-395-001 | Centering Ring, 6″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| 49 | 80-200-342 | Band Contact, Female, .125 Pin, Stainless Steel |
| 50 | 33-085-002 | Bellows, Lower Electrode |
| 51 | 40-238-001 | Block, Pin Chuck, 900 |
| 52 | 42-449-001 | Bracket, Shuttle Center, 900 |
| 53 | 80-200-314 | Cam Follower, 1/2 OD, 8-32 Thread, Stainless Steel |
| 54 | 80-200-366 | Clamp, Worm Gear, 1/4-5/8, Stainless Steel |
| 55 | 80-200-346 | Clamp, 2-Ear, 1/2 Nominal, Crimp, Steel Tubing |
| 56 | 39-710-001 | Collar Flag, 90X |
| 57 | 39-732-001 | Collar Pin, 90XE |
| 58 | 39-767-003 | Coupling Insulator, T/90XE |
| 59 | 80-080-077 | Air Cylinder, 3/4 Stroke, 2.09 Stroke, Double Acting |
| 60 | 80-080-065 | Cylinder, Double Stud Mount, 1 in Stroke, 1/2 Bore |
| 61 | 80-080-072 | Cylinder, Double Ended, 1/2 Stroke, 1-1/8 Bore |
| 62 | 39-756-002 | Elbow Bulkhead, Stainless Steel, 9XXE |
| 63 | 39-756-003 | Elbow, Bulkhead with Fitting, Stainless Steel |
| 64 | 41-127-001 | Flag Chuck, 901E |
| 65 | 41-137-001 | Flag Chuck, 903E |
| 66 | 39-687-002 | Flange, Shuttle, 90X |
| 67 | 80-192-207 | Fitting Adapter, 1/4-1/4 OD Tube Barb, Stainless Steel |
| 68 | 80-195-312 | Fitting Elbow, 1/8 MNPT to 1/8 ID Tube Barb |
| 69 | 80-195-238 | Fitting Plug, 10-32F, Self-Sealing Shut-Off |
| 70 | 80-192-200 | Fitting Straight, 1/4 ID Tube to 1/8 MNPT Barb |
| 71 | 80-192-155 | Fitting Straight, 1/4 OD Tube, 10-32 Male Thread, Brass |
| 72 | 80-192-236 | Fitting Straight, 1/4 OD Tube to 1/8 MNPT, Stainless Steel |
| 73 | 80-195-284 | Fitting Straight, 1/8 OD Tube, 10-32 Male Thread, Brass |
| 74 | 80-195-425 | Fitting Straight, 3/8 OD Tube to 1/4 MNPT, Stainless Steel |
| 75 | 80-195-259 | Fitting Tee, 1/8 ID (2) – .078 ID Tube Barb |
| 76 | 39-761-001 | Gasket, RF Contact, 9XXE |
| 77 | 80-202-323 | Gasket, .170 ID × .312 OD × .016 Thick, Fiber |
| 78 | 40-304-001 | Insulator, Lower Electrode, 90XE |
| 79 | 39-729-001 | Knob Fitting, 900 |
| 80 | 80-152-005 | Hex Nut, 10-32 UNC-2B, Plated Stainless Steel |
| 81 | 80-202-357 | O-Ring, Silicone Gray, 6-3/4 ID × 1/4 Width, D40 |
| 82 | 80-202-191 | O-Ring, Viton, 5/16 ID × 3/32 Width, D70 |
| 83 | 80-202-192 | O-Ring, Viton, 6-1/4 ID × 3/32 Width, D70 |
| 84 | 39-731-001 | Pin Plate, 901E |
| 85 | 39-731-005 | Pin Plate, 903E |
| 86 | 40-297-001 | Quartz Pin, 901E |
| 87 | 40-297-002 | Quartz Pin, 903E |
| 88 | 46-272-003 | Plate, Electrode Support, 90X |
| 89 | 46-467-001 | Plate, Modular Chuck, 90X |
| 90 | 31-388-001 | RF Connector Assembly, 9XXE |
| 91 | 30-231-001 | Ring Assembly, Lower Electrode Seal, 90XE |
| 92 | 80-200-340 | External Ring, 1/4 Shaft, .025 Thick, Stainless Steel |
| 93 | 80-127-584 | Flat Head Phillips Screw, 1/4-20 × 5/8, Locking, Stainless Steel |
| 94 | 80-127-063 | Pan Head Phillips Screw, 10-32 × 1/2, Plated Stainless Steel |
| 95 | 80-127-101 | Pan Head Phillips Screw, 4-40 × 1/4, Locking, Stainless Steel |
| 96 | 80-127-142 | Pan Head Phillips Screw, 8-32 × 3/8, Locking, Stainless Steel |
| 97 | 80-127-273 | Socket Head Cap Screw, 10-32 × 1-1/4, Plated Stainless Steel |
| 98 | 80-127-363 | Socket Head Cap Screw, 10-32 × 1/2, Locking, Stainless Steel |
| 99 | 80-127-263 | Socket Head Cap Screw, 10-32 × 1/2, Plated Stainless Steel |
| 100 | 80-127-362 | Socket Head Cap Screw, 10-32 × 3/8, Locking, Stainless Steel |
| 101 | 80-127-262 | Socket Head Cap Screw, 10-32 × 3/8, Plated Stainless Steel |
| 102 | 39-689-001 | Lifting Screw, 90X |
| 103 | 39-738-001 | Shield, Ground Electrode, Lower, 90XE |
| 104 | 51-038-002 | Standoff, Lower Electrode, 9XX |
| 105 | 40-290-001 | Cylinder Stop, 901E |
| 106 | 80-890-050 | Inner Braided PVC Tube, 1/4 ID, Clear |
| 107 | 80-890-030 | Inner Braided PVC Tube, 1/4 ID, Yellow |
| 108 | 80-890-036 | Inner Braided PVC Tube, 1/4 ID, Black |
| 109 | 80-890-037 | Inner Braided PVC Tube, 1/4 ID, Red |
| 110 | 80-890-038 | Inner Braided PVC Tube, 1/4 ID, Gray |
| 111 | 80-890-045 | Inner Braided PVC Tube, 1/4 ID, Black |
| 112 | 80-890-046 | Inner Braided PVC Tube, 1/4 ID, Yellow |
| 113 | 80-163-006 | Lock Washer, External Tooth, 1/2, Stainless Steel |
| 114 | 80-163-004 | Lock Washer, External Tooth, #10, Stainless Steel |
| 115 | 80-163-001 | Lock Washer, External Tooth, #4, Stainless Steel |
| 116 | 80-162-004 | Flat Washer, #8, Stainless Steel |
Need Parts for Other Equipment?
Allwin21 does its best to provide long-term spare parts support for equipment sold and/or upgraded by Allwin21. For other RTP, plasma asher, plasma etcher, PVD/sputter, metrology, or upgraded legacy equipment, please contact us with the complete equipment and parts information.
For obsolete parts, discontinued components, or unsupported modules, Allwin21 may recommend replacement parts, substitute parts, repair services, upgrade kits, or subsystem modernization solutions to help extend the useful life of the equipment.
Spare Parts Inquiry Form
Please provide the Equipment Model, Equipment LOT ID, Part Number, Part Description, Quantity Required, and Part Photos (if applicable).