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Spare Parts for AW-90xeR

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Spare Parts for AW-901eR AW-903eR

Item Part Number Description
1 SA5-0602-B Computer for Matrix 105 and Tegal, Replace SA5-0602-A
2 A5-1021 Memory, 256M
3 C9-344-AW Tegal, Shower Head, AW
4 025-0500 Robot, 7″Z x 10.5
5 29-464-001 ground ring
6 30-231-001 Ring Assembly, Lower Electrode Seal, 90XE
7 31-147-008-AW Delivery Manifold Assembly, Including 025-0254,045-0133,045-0182-00,045-0183,045-0214,065-0070,065-0082,A5-1010-10
8 31-165-004 Servo Motor
9 31-165-005 Servo Motor
10 31-165-006 Servo Motor
11 31-193-004-AW Valve Assy, Solenoid, WIN
12 31-236-002 ASSY VARIABLE CAPACITOR
13 31-375-001 PRESSURE SENSOR ATM
14 31-388-001 RF Connector Assembly, 9XXE
15 33-085-002 Bellows, Lower Electrode
16 37-221-001 ELECTRODE UPPER 903E ANODIZED
17 37-221-002 ELECTRODE UPPER 903E
18 37-221-003 ELECTRODE UPPER HIGH PERFORMANCE – ANODIZED
19 37-568-001 CLAMP INSULATOR RING
20 39-341-005 Chamber Body Vented
21 39-342-001 CHAMBER TOP
22 39-343-001 MANIFOLD CHAMBER
23 39-344-002 ELECTRODE UPPER 901E
24 39-344-02 Tegal  shower head,
25 39-344-010 ELECTRODE UPPER WATER JACKET 903
26 39-627-002 Centering Ring, 6″-AL, Tegal 901e Plasma Etcher
27 39-627-003 Centering Ring, 4″-AL, Tegal 901e Plasma Etcher
28 39-627-004 Centering Ring, 5″-AL, Tegal 901e Plasma Etcher
29 39-627-005 4 inch (100mm) BACKSIDE ALUMINUM RING
30 39-627-006 4 inch (100mm) ALUMINUM INSERT RING
31 39-680-003 ELECTRODE CONE HEAD VENTED 903
32 39-682-001 GAS DIFFUSION TUBE BOTTOM
33 39-683-001 GAS DIFFUSION TUBE TOP
34 39-687-002 Flange, Shuttle, 90X
35 39-689-001 Lifting Screw, 90X
36 39-710-001 Collar Flag, 90X
37 39-729-001 Knob Fitting, 900
38 39-731-001 Pin Plate, 901E
39 39-731-005 Pin Plate, 903E
40 39-732-001 Collar Pin, 90XE
41 39-733-001 3″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode
42 39-733-002 4″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode
43 39-733-003 5″, Tegal 901e Plasma Etcher Chuck, Through the Wall Lower Electrode
44 39-733-003 5″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode
45 39-733-004 6″, Tegal 901e Plasma Etcher Chuck, Through the Wall Lower Electrode
46 39-733-007 6″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode
47 39-735-001 3″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
48 39-735-002 4″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
49 39-735-002-MOD Lower Electrode Anodized ,3″&4″, Modified
50 39-735-003 5″, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
51 39-735-003 5″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
52 39-735-004 ELECTRODE LOWER 6 inch 903E
53 39-735-005 3″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
54 39-735-006 4″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
55 39-735-007 5″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
56 39-735-019 6″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
57 39-735-020 6″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
58 39-735-020 6″, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
59 39-738-001 Shield, Ground Electrode, Lower, 90XE
60 39-741-001 3″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
61 39-741-002 4″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
62 39-741-003 5″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
63 39-741-005 3″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
64 39-741-009 Lower Electrode 6″, Tegal
65 39-741-010 5″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
66 39-741-011 4″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
67 39-741-019 Rectangle, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
68 39-741-024 Read Rite SQR, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
69 39-741-025 6″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
70 39-741-026 6″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
71 39-756-002 Elbow Bulkhead, Stainless Steel, 9XXE
72 39-756-003 Elbow, Bulkhead with Fitting, Stainless Steel
73 39-761-001 Gasket, RF Contact, 9XXE
74 39-767-002 COUPLING INSULATOR
75 39-767-003 Coupling Insulator, T/90XE
76 39-818-001 SLEEVE FIBER OPTIC
77 39-819-001 BLOCK FIBER OPTIC
78 39-848-005 BLOCK STAGE 4 inch CAT WHISKER
79 39-853-004 SPATULA 4 inch
80 39-926-001 ELECTRODE TOP COOLED
81 39-927-001 3″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
82 39-927-002 4″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
83 39-927-003 5″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
84 39-927-006 4″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
85 39-927-007 5″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
86 39-927-008 Electrode Lower 6”
87 39-927-009 Motorola Special, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
88 39-927-019 4″ FA GaAs, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode
89 39-927-020 6″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
90 39-927-021 6″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode
91 39-928-001 FITTING HOSE UPPER
92 39-929-001 CAP GAS UPPER COOLED ELECT
93 40-159-001 Rod Sapphire 25dia straight
94 40-238-001 Block, Pin Chuck, 900
95 40-290-001 Cylinder Stop, 901E
96 40-294-003 Centering Ring, 4″-AL, Tegal 903e Plasma Etcher
97 40-295-003 Centering Ring, 5″-AL, Tegal 903e Plasma Etcher
98 40-297-001 Quartz Pin, 901E
99 40-297-002 Quartz Pin, 903E (40-297-002C Ceramic for WIN)
100 40-304-001 Insulator, Lower Electrode, 90XE
101 40-306-002 Centering Ring, 6″-AL, Tegal 903e Plasma Etcher
102 40-374-002 STOP SOLID 4 inch
103 40-395-001 Centering Ring, 6″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher
104 40-395-002 Centering Ring, 5″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher
105 40-395-003 Centering Ring, 4″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher
106 40-395-004 Centering Ring, 3″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher
107 40-750-601 tegal 6″ Focus Ring,Ceramic
108 41-127-001 Flag Chuck, 901E
109 41-137-001 Flag Chuck, 903E
110 41-399-001 Ground Ring, KIT FLD UPGR CHMBR GROUND
111 42-449-001 Bracket, Shuttle Center, 900
112 46-272-003 Plate, Electrode Support, 90X
113 46-467-001 Plate, Modular Chuck, 90X
114 51-038-002 Standoff, Lower Electrode, 9XX
115 55-005-001 Belt Drive,LCR
116 55-008-001 Belt,SPAT
117 80-080-052 Cylinder,DBL PANCAKE,1-1/2S  Tegal 901 shuttle aligner
118 80-080-065 Cylinder, Double Stud Mount, 1 in Stroke, 1/2 Bore
119 80-080-072 Cylinder, Double Ended, 1/2 Stroke, 1-1/8 Bore
120 80-080-077 Air Cylinder, 3/4 Stroke, 2.09 Stroke, Double Acting
121 80-095-794 UPC-8130 N2-225sccm MFC
122 80-127-063 Pan Head Phillips Screw, 10-32 × 1/2, Plated Stainless Steel
123 80-127-101 Pan Head Phillips Screw, 4-40 × 1/4, Locking, Stainless Steel
124 80-127-142 Pan Head Phillips Screw, 8-32 × 3/8, Locking, Stainless Steel
125 80-127-262 Socket Head Cap Screw, 10-32 × 3/8, Plated Stainless Steel
126 80-127-263 Socket Head Cap Screw, 10-32 × 1/2, Plated Stainless Steel
127 80-127-273 Socket Head Cap Screw, 10-32 × 1-1/4, Plated Stainless Steel
128 80-127-362 Socket Head Cap Screw, 10-32 × 3/8, Locking, Stainless Steel
129 80-127-363 Socket Head Cap Screw, 10-32 × 1/2, Locking, Stainless Steel
130 80-127-584 Flat Head Phillips Screw, 1/4-20 × 5/8, Locking, Stainless Steel
131 80-152-005 Hex Nut, 10-32 UNC-2B, Plated Stainless Steel
132 80-162-004 Flat Washer, #8, Stainless Steel
133 80-163-001 Lock Washer, External Tooth, #4, Stainless Steel
134 80-163-004 Lock Washer, External Tooth, #10, Stainless Steel
135 80-163-006 Lock Washer, External Tooth, 1/2, Stainless Steel
136 80-192-155 Fitting Straight, 1/4 OD Tube, 10-32 Male Thread, Brass
137 80-192-200 Fitting Straight, 1/4 ID Tube to 1/8 MNPT Barb
138 80-192-207 Fitting Adapter, 1/4-1/4 OD Tube Barb, Stainless Steel
139 80-192-236 Fitting Straight, 1/4 OD Tube to 1/8 MNPT, Stainless Steel
140 80-195-238 Fitting Plug, 10-32F, Self-Sealing Shut-Off
141 80-195-259 Fitting Tee, 1/8 ID (2) – .078 ID Tube Barb
142 80-195-284 Fitting Straight, 1/8 OD Tube, 10-32 Male Thread, Brass
143 80-195-312 Fitting Elbow, 1/8 MNPT to 1/8 ID Tube Barb
144 80-195-425 Fitting Straight, 3/8 OD Tube to 1/4 MNPT, Stainless Steel
145 80-198-054 24 DC Valve
146 80-200-314 Cam Follower, 1/2 OD, 8-32 Thread, Stainless Steel
147 80-200-340 External Ring, 1/4 Shaft, .025 Thick, Stainless Steel
148 80-200-342 Band, Cont, Fem, .125pin, .320L
149 80-200-342 Band Contact, Female, .125 Pin, Stainless Steel
150 80-200-346 Clamp, 2-Ear, 1/2 Nominal, Crimp, Steel Tubing
151 80-200-366 Clamp, Worm Gear, 1/4-5/8, Stainless Steel
152 80-202-191 O-Ring, Viton, 5/16 ID × 3/32 Width, D70
153 80-202-192 O-Ring, Viton, 6-1/4 ID × 3/32 Width, D70
154 80-202-323 Gasket, .170 ID × .312 OD × .016 Thick, Fiber
155 80-202-357 O-Ring, Silicone Gray, 6-3/4 ID × 1/4 Width, D40
156 80-890-030 Inner Braided PVC Tube, 1/4 ID, Yellow
157 80-890-036 Inner Braided PVC Tube, 1/4 ID, Black
158 80-890-037 Inner Braided PVC Tube, 1/4 ID, Red
159 80-890-038 Inner Braided PVC Tube, 1/4 ID, Gray
160 80-890-045 Inner Braided PVC Tube, 1/4 ID, Black
161 80-890-046 Inner Braided PVC Tube, 1/4 ID, Yellow
162 80-890-050 Inner Braided PVC Tube, 1/4 ID, Clear
163 83-096-001 VAC Valve VCR FTG, 180degree,Tegal, Switch not included
164 93-229-005B RF cable, tegal
165 94-136-002 HARNESS, SHUTTLE POS
166 94-400-001 Harness Assy,, SNSR，ALL SENSORS
167 S99-126-006 PCB, Gas Interface, Tegal, Rev.D
168 99-197-002 PCB,SSL-2, Snsr Slot
169 99-287-003 Shuttle Interface Board, replace 99-287-001
170 0995-10597 Cylinder,Pancake,Pin Up/Down
171 CW1109-41401 Chuck Assy., 3″ & 4″
172 CW1109-61401 WAFER CHUCK ASSY 6″ 903E – W/LWR ELECTRODE 39-741-009
173 S2100-0900-030 PCB, RF Interface, Tegal
174 S2100-0901-008 Q Main control board, Upgrade Kit, Tegal 901e, Tegal 903e. S2100-0901-008 R with cable(062-0027)
175 13856-04 RF cable,Tegal-901e TTW RF cable ,RF generator(MKS ELITE 300) to Matching box

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Additional Plasma Etcher / RIE Keywords and Legacy Platform References

Plasma Etcher, RIE Etcher, Reactive Ion Etcher, Dry Etch Equipment, Isotropic Plasma Etcher, Downstream Plasma Etcher, Semiconductor Plasma Etch, Low Damage Plasma Etch, Compound Semiconductor Etch, III-V Plasma Etch, MEMS Release Etch, Oxide Etch, Nitride Etch, Polymer Etch, Photoresist Etch, Passivation Etch, Via Etch, Contact Etch, Backside Etch, Tegal 901e, Tegal 901eR, Tegal 903e, Tegal 903eR, Tegal 915, Tegal 965, Matrix 303, Matrix 403, Matrix 302, Matrix System One Etcher, Lam Research, Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790, Plasma-Therm RIE, Drytek RIE, GCA Plasma Etcher, Legacy Plasma Etcher Support, Semiconductor Dry Etch System, Wafer Etching Equipment.

Dry Etch System: ULVAC
Hitachi High-Technologies
Plasma-Therm
SPTS Technologies
Samco Inc.
NAURA Microelectronics
Plasma Etch
YAC Corporation, Tegal, Matrix, Lam Research, Applied Materials, Samaco, Tel, PlasmaTherm.