Spare Parts for AccuThermo AW820R RTP System
| Item | Part Number | Description |
|---|---|---|
| 1 | 2451-0013-01 | Lamp Tung-Halo 1500W |
| 2 | 2504-0070 | O-Ring, Purge Inlet |
| 3 | A5-0336 | O-Ring, Flange to Tube |
| 4 | 5101-0030 | Fuse, 1A 250V, Fst-Blo |
| 5 | A5-0440 | Fuse, 7A 250V Fst-Blo |
| 6 | A5-0346 | Fuse, 10A, 250V, Fst-Blo |
| 7 | A5-0409 | O-Ring, AW820R |
| 8 | A5-0418 | O-Ring, AW820R |
| 9 | 2109-0050 | Lampholder, Tung Halg, 10A 600V |
| 10 | A5-0305 | Flow Switch, NPT, 5A, 125/250VAC |
| 11 | A5-0306 | Solenoid Valve, 24/60 |
| 12 | 2901-0040 | Digital Panel Meter Assy |
| 13 | 5300-0060 | Thermostat Interlock “A” |
| 14 | 5300-0070 | Thermostat Overcool “B” |
| 15 | 5300-0090 | Thermostat Open=150F CL=135F |
| 16 | 7100-0874-11 | ERP Pyro, Water Cooled |
| 17 | 2100-0900-078 | PCA, Main Control Board |
| 18 | 2100-0900-084 | PCA, Gas Control Board |
| 19 | A5-0410 | TC Wire, 0.010″ DIA, 24″L |
| 20 | A5-0408 | Ceramic Thermocouple Insulators, 6″ |
| 21 | A4-1103-01 | Quartz, T-Shape TC Wafer |
| 22 | 9010-0440 | Pin, Quartz |
| 23 | 9820-0810 | Cable Thermocouple Type K (Feet) |
| 24 | A5-0189A | TC Probe, Omega |
| 25 | 4501-0050-B | Contactor, 3 Pole |
| 26 | A5-0307 | Switch Power On |
| 27 | A5-0308 | Switch Power Off |
| 28 | A5-0309 | Switch Lamp Power |
| 29 | A5-0311 | Relay, 24VAC |
| 30 | A5-0130 | Power Supply |
| 31 | A5-0313 | Circuit Breaker, 3 Pole, 100A |
| 32 | 4803-0010 | SCR Dual Pair, 90A, 600V – 4 Zones Version |
| 33 | 045-0119 | Relay, Solid State, 240 VAC, 25A – 10 Zones Version |
| 34 | 7400-0100-06 | Quartz Tube, 8″ |
| 35 | A4-1110-00 | Quartz Tray, AW820R |
| 36 | 014-0101 | Susceptor 6″ Base |
| 37 | 014-0102 | Susceptor 6″ Cover |
Need Parts for Other Equipment?
Allwin21 does its best to provide long-term spare parts support for equipment sold and/or upgraded by Allwin21. For other RTP, plasma asher, plasma etcher, PVD/sputter, metrology, or upgraded legacy equipment, please contact us with the complete equipment and parts information.
For obsolete parts, discontinued components, or unsupported modules, Allwin21 may recommend replacement parts, substitute parts, repair services, upgrade kits, or subsystem modernization solutions to help extend the useful life of the equipment.
Spare Parts Inquiry Form
Please provide the Equipment Model, Equipment LOT ID, Part Number, Part Description, Quantity Required, and Part Photos (if applicable).