Spare Parts for AccuThermo AW610M RTP System
| Item | Part Number | Description |
|---|---|---|
| 1 | 2451-0010-02 | Lamp, 1200W 208V |
| 2 | 2504-0070 | O-Ring, Purge Inlet |
| 3 | 2504-0160-AW1 | O-Ring, Flange to Tube, Door to Flange |
| 4 | 5101-0030 | Fuse, 1A 250V, Fst-Blo |
| 5 | 5101-0090 | Fuse, 1/2A 250V, Fst-Blo |
| 6 | A5-0346 | Fuse, 10A 250V |
| 7 | 2109-0050 | Lampholder, Tung Halg, 10A 600V |
| 8 | A5-0391 | Valve Solenoid NC-2 way 3/8″ |
| 9 | A5-0138 | Bellows Valve |
| 10 | A5-0182 | Valve, 12VDC |
| 11 | A5-0390 | Flow Switch, 3/8″ NPT, 1-10LPM |
| 12 | 2901-0040 | Digital Panel Meter Assy |
| 13 | 5107-0010 | Door Interlock Switch |
| 14 | 5107-0020 | Cabinet Interlock |
| 15 | 5300-0060 | Thermostat Interlock “A” |
| 16 | 5300-0070 | Thermostat Overcool “B” |
| 17 | 5300-0090 | Thermostat Open=150F CL=135F |
| 18 | A8-1103-00 | TC Assembly, T-Shape, Quartz |
| 19 | 7100-0874-11 | ERP Pyro, Water Cooled |
| 20 | 2100-0900-078 | PCA, Main Control Board |
| 21 | 2100-0900-054 | PCA, Gas Control Board |
| 22 | A5-1001-02 | Contactor, 3-P |
| 23 | 045-0119 | Relay, Solid State, 240 VAC, 25A |
| 24 | A4-0067-01 | Quartz Isolation Tube with Pyrometer Window |
| 25 | 7400-0082-01-4 | 6-inch Tray for 4 to 6 inch Wafers |
| 26 | A4-0004-01 | Quartz Tray, Square |
Need Parts for Other Equipment?
Allwin21 does its best to provide long-term spare parts support for equipment sold and/or upgraded by Allwin21. For other RTP, plasma asher, plasma etcher, PVD/sputter, metrology, or upgraded legacy equipment, please contact us with the complete equipment and parts information.
For obsolete parts, discontinued components, or unsupported modules, Allwin21 may recommend replacement parts, substitute parts, repair services, upgrade kits, or subsystem modernization solutions to help extend the useful life of the equipment.
Spare Parts Inquiry Form
Please provide the Equipment Model, Equipment LOT ID, Part Number, Part Description, Quantity Required, and Part Photos (if applicable).