Product Description
Part Number: A78-302-01
Description: A78-302-01 O-Ring for Gasonics Aura 3010
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Allwin21 Corp. has been focusing on providing solutions and enhancements to Gasonics Aura 1000, Gasonics Aura 3010, Gasonics L3510 used plasma Asher Descum semiconductor process equipment. These OEM Asher semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Gasonics Aura 1000 Plasma Asher
Manufacturer: Gasonics | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Solid Robotic Wafer Transfer-Allwin21 Own Technology | Plasma Power: Microwave | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 3 lines capability with customized MFCs range
Gasonics Aura 3010 Plasma Asher
Manufacturer: Gasonics | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 4″/5″/6″/8″Capability | Wafer loading: Automatic, Solid Robotic Wafer Transfer-Allwin21 Own Technology | Plasma Power: Microwave | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 3 lines capability with customized MFCs range
Manufacturer: Gasonics | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 4″/5″/6″/8″Capability | Wafer loading: Automatic, Solid Robotic Wafer Transfer-Allwin21 Own Technology | Plasma Power: Microwave | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 3 lines capability with customized MFCs range
Gasoncis L3510 Upgrade Kit
The Upgrade kit for Gasonics L3510 includes an advanced AW-3510 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot .
Gasonics Aura 3010 Upgrade Kit
The Upgrade kit for Gasonics Aura® 3010, Gasonics Aura® 3000 includes an advanced AW-3000 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot .
Gasonics Aura 1000 Upgrade Kit
The Upgrade kit for Gasonics Aura® 1000 includes an advanced AW-1000 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-1000 software ,new main control board and new wafer heating function with Allwin21 RTP technology.
