Home / Products / Upgrade Kits / AW610M VS. AW610
AccuThermo AW610M vs. AccuThermo AW610 RTP Systems
The AccuThermo AW610 Rapid Thermal Processing (RTP) system was manufactured by Allwin21 from 2006 to 2019. In 2019, the AW610 was replaced by the latest generation AccuThermo AW610M RTP platform. The AW610M incorporates significant improvements in temperature control, reliability, maintenance accessibility, gas handling capability, utility consumption, and software functionality while maintaining the proven RTP architecture used in semiconductor manufacturing, universities, research institutes, and pilot production facilities worldwide.
- 2006 – 2019: AccuThermo AW610 RTP System
- 2019 – Present: AccuThermo AW610M RTP System
- Status: AW610M is the latest generation 6-inch RTP platform from Allwin21.
- Support: Allwin21 continues to provide technical support, spare parts, refurbishment, and upgrade services for existing AW610 systems.
| Feature | AW610 | AW610M |
|---|---|---|
| Lamp Control Zones | 4 Zones | 6 Zones |
| Chassis Design | Original Design | Larger Chassis for Easier Maintenance |
| Long Process Capability | Standard | Improved for Longer Steady Processes |
| Lamp Power Control | Triac Control | SSR (Solid State Relay) Control |
| Cooling Air and Water Valves | Original Design | 24V Solenoid Valves |
| Cooling N₂ / CDA Consumption | Continuous Flow | Automatically Stops After 5 Minutes Idle |
| Maximum Gas Lines | Up to 4 MFC Controlled Gas Lines | Up to 6 MFC Controlled Gas Lines |
| Software Platform | Original Generation | Latest Generation Platform |
| RAMP Intensity Limit | No | Yes |
| STEADY Intensity Limit | No | Yes |
| Individual Lamp Zone Control in Recipe | No | Yes |
- 6-zone lamp control provides improved temperature uniformity and process flexibility.
- SSR lamp control improves reliability and long-term maintenance performance.
- Larger chassis design improves accessibility for maintenance and service.
- Automatic cooling gas shutoff reduces nitrogen or CDA consumption during idle periods.
- Supports up to six process gas lines with mass flow controllers.
- Independent lamp intensity settings for RAMP and STEADY process steps.
- Individual lamp zone control can be incorporated directly into process recipes.
- Enhanced diagnostics, maintenance, and troubleshooting functions.
- Improved process development flexibility for semiconductor manufacturing and R&D applications.
Many AccuThermo AW610 RTP systems remain in operation today. Customers seeking improved temperature control, expanded gas handling capability, enhanced software functionality, lower utility consumption, and long-term support may consider upgrading to the latest AW610M platform.
- Technical Support
- Spare Parts
- System Refurbishment
- Controller Upgrades
- Software Upgrades
- Field Service
- Process Assistance
Working Equipment — On-Site Upgrade: If the original system is in working condition, Allwin21 can normally perform the standard controller/electronics and robotics upgrade at the customer’s site.
Non-Working Equipment / Major Repair / New Functions — Ship to Allwin21: If the original system is not working, has missing or damaged parts, requires significant repair, or requires major new functions, we recommend shipping the complete system to Allwin21.
Combining extensive troubleshooting, repair, parts replacement, system modification, and an upgrade at the customer site can be complicated and inefficient. At Allwin21, our engineers can evaluate the actual equipment condition, repair or refurbish the system, install the upgrade and new functions, integrate all subsystems, and fully test the complete equipment before shipment back to the customer.
For non-working or modified systems, Allwin21 can provide an initial estimated quotation based on the available information. The final scope and quotation may be revised after the equipment is received and evaluated.
Need Help Selecting or Upgrading an RTP System?
Send substrate material, wafer size, process temperature, hold time, process gases, throughput requirements, and application details for recommendation.
Additional RTP Keywords
AccuThermo AW610, AccuThermo AW610M, AW610 RTP, AW610M RTP, RTP System Upgrade, Rapid Thermal Processing System, Rapid Thermal Annealing System, Semiconductor RTP Equipment, RTP Controller Upgrade, AG Heatpulse Replacement, RTP Spare Parts, RTP Service, RTP Refurbishment, Semiconductor Annealing Equipment, Ohmic Contact Annealing, Silicidation, Diffusion, Oxidation, Nitridation, Compound Semiconductor RTP, GaAs RTP, InP RTP, GaN RTP, SiC RTP