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AccuThermo AW610M vs. AccuThermo AW610 RTP Systems
The AccuThermo AW610 Rapid Thermal Processing (RTP) system was manufactured by Allwin21 from 2006 to 2019. In 2019, the AW610 was replaced by the latest generation AccuThermo AW610M RTP platform. The AW610M incorporates significant improvements in temperature control, reliability, maintenance accessibility, gas handling capability, utility consumption, and software functionality while maintaining the proven RTP architecture used in semiconductor manufacturing, universities, research institutes, and pilot production facilities worldwide.
- 2006 – 2019: AccuThermo AW610 RTP System
- 2019 – Present: AccuThermo AW610M RTP System
- Status: AW610M is the latest generation 6-inch RTP platform from Allwin21.
- Support: Allwin21 continues to provide technical support, spare parts, refurbishment, and upgrade services for existing AW610 systems.
| Feature | AW610 | AW610M |
|---|---|---|
| Lamp Control Zones | 4 Zones | 6 Zones |
| Chassis Design | Original Design | Larger Chassis for Easier Maintenance |
| Long Process Capability | Standard | Improved for Longer Steady Processes |
| Lamp Power Control | Triac Control | SSR (Solid State Relay) Control |
| Cooling Air and Water Valves | Original Design | 24V Solenoid Valves |
| Cooling N₂ / CDA Consumption | Continuous Flow | Automatically Stops After 5 Minutes Idle |
| Maximum Gas Lines | Up to 4 MFC Controlled Gas Lines | Up to 6 MFC Controlled Gas Lines |
| Software Platform | Original Generation | Latest Generation Platform |
| RAMP Intensity Limit | No | Yes |
| STEADY Intensity Limit | No | Yes |
| Individual Lamp Zone Control in Recipe | No | Yes |
- 6-zone lamp control provides improved temperature uniformity and process flexibility.
- SSR lamp control improves reliability and long-term maintenance performance.
- Larger chassis design improves accessibility for maintenance and service.
- Automatic cooling gas shutoff reduces nitrogen or CDA consumption during idle periods.
- Supports up to six process gas lines with mass flow controllers.
- Independent lamp intensity settings for RAMP and STEADY process steps.
- Individual lamp zone control can be incorporated directly into process recipes.
- Enhanced diagnostics, maintenance, and troubleshooting functions.
- Improved process development flexibility for semiconductor manufacturing and R&D applications.
Many AccuThermo AW610 RTP systems remain in operation today. Customers seeking improved temperature control, expanded gas handling capability, enhanced software functionality, lower utility consumption, and long-term support may consider upgrading to the latest AW610M platform.
- Technical Support
- Spare Parts
- System Refurbishment
- Controller Upgrades
- Software Upgrades
- Field Service
- Process Assistance
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Additional RTP Keywords
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