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Matrix Systems Upgrade Kits
Allwin21 provides upgrade kits for Matrix 104, Matrix 105, Matrix 106, Matrix 205, Matrix 302, Matrix 303, and Matrix 403 plasma systems. The upgrade kits replace obsolete controllers, displays, electronics, PCBs, pressure control modules, temperature control modules, and other discontinued components while preserving the original process platform.
The upgrade can be performed on-site with minimal facility changes. Existing utility connections remain in place. The upgraded system provides modern PC-based control, graphical user interface, recipe storage, process data storage, diagnostics, improved reliability, and long-term support.
- Replace obsolete Z-80 controllers and displays
- Replace obsolete controller PCBs and electronics
- Improve system reliability and maintainability
- Add modern GUI, recipe management, and data storage
- Simplify troubleshooting and calibration
- Reduce downtime caused by obsolete components
- Extend the life of production-proven process platforms
- Add optional GEM/SECS II and advanced EOP functions
- Level 1 — Controller, PCB, and Allwin21 Software Upgrade
- Level 2 — Level 1 + Compact Integrated Robotic Wafer Transfer
- Level 3 — Level 1 or Level 2 + Key Subsystem Replacement (Air-cooling RF Generator, New RF Matching, New EOP function
| Comparing Item | New AW-105R / AW-303R | Upgraded Matrix System | Original Matrix System |
|---|---|---|---|
| Wafer Transfer | Integrated Solid Robotic Wafer Transfer | Compact Integrated Solid Robotic Wafer Transfer – Level 2 | Obsolete Orbit Robot |
| Wafer transfer control | Robot controller with PC, more stable | Robot controller with PC, more stable – Level 2 | Old control board |
| Cassette Station | Solid cassette station with sensors, no trouble shooting | Elevator station. Obsolete | Elevator station. Obsolete |
| Wafer Aligner | Yes, much better performance for sensitive processes | N/A | N/A |
| Temperature Controller | New | New | Used |
| RF interfere | No | Some time | Some time |
| Frame | New | Used | Used |
| Controller | New embedded PC | New embedded PC | Z-80 MPU |
| Monitor | 15″ Touch Screen | 15″ Touch Screen | Old obsolete display |
| User Interface | GUI | GUI | Text |
| Data Storage | Store in Hard Disk | Store in Hard Disk | None |
| Recipe Edit | Easy to edit with GUI | Easy to edit with GUI | Magnetic Card |
| Recipes | Unlimited | Unlimited | Only 20 |
| Online Help | Yes | Yes | None |
| Gas Calibration | Easy to do with GUI | Easy to do with GUI | None |
| Diagnostic Function | More functions and AD/DA, I/O hardware exposed for easier maintenance and trouble shooting | More functions and I/O hardware exposed for easier maintenance and trouble shooting | Limited |
| A/D Precision | 14-16bits | 14-16bits | 12bits |
| PCB | Only one, new, simple, much stable | Only one, new, simple | Used 5 of PCBs, Obsolete, pain, connection issues |
| EOP Function (Option) | Allwin21 New Method | Allwin21 New Method | Old Method, NOT good. |
| GEM/SEC II function (Option) | Optional | Optional | No |
| Alarm Light Tower | Yes | Optional | No |
| Vacuum Valves | New | Used | Used |
| Vacuum Meters | New | Used | Used |
| MFC | New | Used | Used |
| Gas lines | New | Used | Used |
| Chamber | New | Used | Used |
| Chuck | New | Used | Used |
| Door | New | Used | Used |
| O Ring | New | New | Used |
| RF Power | New, Air-Cooling | Used, Water Cooling. Optional – Level 3 | Used, Water Cooling |
| RF Matching | New | Used. New Optional – Level 3 | Used |
| Quartz Chamber | New | Used | Used |
| Pump Ring | New | Used | Used |
| Cables | New | Used | Used |
| Wires | New | Used | Used |
| Other Components | New | Used | Used |
| Stability | Much Better | Better | Limited |
| OEM Support | Yes | Limited | No |
Request an Upgrade Kit Review
Please provide the following equipment information and upgrade requirements. Based on your equipment condition, upgrade goals, and future plans, Allwin21 will review and recommend a suitable upgrade or retrofit solution.
Additional Upgrade Kit Keywords and Legacy Equipment References
Matrix 104 Upgrade, Matrix 105 Upgrade, Matrix 106 Upgrade, Matrix 205 Upgrade, Matrix 302 Upgrade, Matrix 303 Upgrade, Matrix 403 Upgrade, Matrix Controller Upgrade, Matrix Orbit Robot Upgrade, Matrix RF Generator Upgrade, Matrix Plasma Asher Upgrade, Matrix Plasma Etcher Upgrade, Matrix Retrofit, Matrix Refurbishment, Matrix Upgrade Kit, Matrix System Modernization, Plasma Asher Upgrade Kit, Plasma Etcher Upgrade Kit.