Spare Parts for AW-B3000 Barrel Batch Plasma Asher Cleaning System
10PM119-500RF Generator -Obsolete!!
| Item | Part Number | Description |
|---|---|---|
| 1 | 058-0500 | RF Matching Unit, Branson 3000 |
| 2 | 045-0146 | Throttle Valve |
| 3 | C04476 | Window 12″ Reactor Chamber |
| 4 | S2100-3000-008 | PCA, Main Control Board, Branson, Rev. R |
| 5 | S2100-3000-008 | PCA, Main Control Board, Branson, Rev. R |
| 6 | E05361 | Quartz Chamber, Branson, 10″ X 20″ |
| 7 | 055-0045-01 | Lift & Turn Compression Latch, door latching |
| 8 | E04598-00 | 12 inch diameter quartz chamber reactor |
| 9 | 058-0700 | EOP Assembly |
| 11 | 04015-AA | PM-112 RF Generator -Obsolete!! |
| 12 | PM-921C | PM-921C-TEMP Controller -Obsolete!! |
| 13 | PM906U 4 | Process Programmer -Obsolete!! |
| 14 | 16498-01 | Display Driver -Obsolete!! |
| 15 | Branson 3000 | Main Console |
| 16 | AW-3000 | AW-B3000 Controller |
| 17 | A5-0113B | Keyboard, USB |
| 18 | A5-0112B | Mouse, USB |
| 19 | A5-0110 | USB 2.0 Flash Drive with Software/Manual Backup |
| 20 | 052-0046-01 | Cable, Controller2, 3/chassis w/EOP |
| 21 | 022-0031 | RF Control Cable, DB15-DB15, M-M |
| 22 | 052-0008-01 | Cable, Controller to Baratron |
| 23 | 045-0146 | Throttle valve |
| 24 | 042-0001-01 | Cable, Swivel Valve to Main Control |
| 25 | 058-0100-00 | Lamp tower Assy |
| 26 | 13856-04 | RF Coaxial Cable |
| 27 | ACG-10 | RF Generator |
| 28 | 025-0146 | Resistive Stylus && Mounted Holder |
| 29 | 045-0153 | Clamp, Wing nut, NW40 |
| 30 | 045-0158 | NW40 Centering Ring, Silicone/SST |
| 31 | 052-0037-01 | Cable, Thermocouple M/F 6FT |
| 32 | 055-0042-01 | K Type TC PROBE |
| 33 | 054-0007-01 | Quartz Tube , TC |
| 34 | L-10CS | Gasket, Door Seal, 10″, L Type Gasket, 10″ Clear Silicon |
| 35 | L-12CS | Gasket, Door Seal, 12″, L Type Gasket, 12″ Clear Silicon |
| 36 | L-8CS | Gasket, Door Seal, 8″, L Type Gasket, 8″ Clear Silicon |
| 37 | A5-0266-A | MFC, O2, 1000SCCM |
| 38 | S2100-3000-732C2 | PCA,RF Matching Control, Branson/IPC Upgrade Kit |
Need Parts for Other Equipment?
Allwin21 does its best to provide long-term spare parts support for equipment sold and/or upgraded by Allwin21. For other RTP, plasma asher, plasma etcher, PVD/sputter, metrology, or upgraded legacy equipment, please contact us with the complete equipment and parts information.
For obsolete parts, discontinued components, or unsupported modules, Allwin21 may recommend replacement parts, substitute parts, repair services, upgrade kits, or subsystem modernization solutions to help extend the useful life of the equipment.
Spare Parts Inquiry Form
Please provide the Equipment Model, Equipment LOT ID, Part Number, Part Description, Quantity Required, and Part Photos (if applicable).
Additional Keywords
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