Product Description
OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
Key Features
-
- Chamber size: φ 600mm-φ1800mm
- 60-point optical thickness monitor.
- RF ion source achieving uniformed, larger ion beam distribution over a larger area at high ion current density.
- Over 100 layers can be deposited by 2 EB guns and multi-point crucible hearth or annular hearth.
- Auto-deposition control system for fully automated process.
- Center-driving or planetary substrate dome is selectable.
- Diffusion pumps plus Polycold or Cryo- pumps.
Specifications
| Model | OTFC-1800CBI/DBI |
| Vacuum Chamber | SUS304, φ1800mm×1920mm (H) |
| Substrate Dome Size | φ1600mm |
| Substrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 23 cm RF ion source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps |
Performance
| Ultimate Pressure | 7.0×10-5 Pa or lower |
| Pump Down Rate | 20 min (Atm. to 1.3×10-3 Pa) |
| Substrate Heater | 350℃ (max.) |
Utility
| Layout Dimensions | 5700mm (W)×7700mm (D)×4000mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 150kVA approx. |
| Cooling Water Flow Rate | 180ℓ/min or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 11200kg approx. |
