Product Description

Matrix 105 Spare Parts – Miscellaneous

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0101-0387 KIT, SYSTEM SET UP 1 EA
0101-0067 KIT, PROGRAM CARD 1 EA
0993-10024 LABEL, WRITE~ON PROGRAM 10 EA
0993-10531 CARD, MAGNETIC STRIPE 10 EA
0101-0236 ASSY, 208 DELTA MOV 1 EA
0990-12003 RESISTOR, MOV 275V 140 2 EA
0990-90008 F– USE, SA 250 VDC S/B 5 EA
0990-90016 F– USE, 3/4 AMP SLO-BLO 3 EA
0990-95010 LAMP, PUSHBUTTON SWITCH 5 EA
0990-97004 RECEPTACLE NEMA L6-30R 1 EA
0992-50006 ENCLOSURE EXHAUST FITTING 1 EA
0992-60092 PIN, WAFER RETAINER 4 EA
0992-60135 PIN, WAFER LIFTING SS BLWS 3 EA
0994-60005 O-RING, DOOR RED SILICONE 1 EA
0994-60006 O-RING, ANODIZED CHAMBER 2 EA
0994-60007 O-RING, QUARTZ CHAMBER RED 1 EA
0994-60008 O-RING, VITON 70 DUROMETER 3 EA
0994-60050 O-RING, CHUCK SEAL 103 1 EA
0994-60055 O-RING, P-7 WHITE SILICON 3 EA
0994-70029 FITTING 3 EA
0994-70054 GASKET, NICKEL VCR WITH 2 EA
0994-70056 FITTING, VCR TO ·1/4″ TUBE 1 EA
0995-15004 O-RING, KF-40 CENTERING 2 EA
0992-60016 SHOE, RF GENERATOR 2 EA
0993-90001 HANDLE, OVAL 4 9/16″ RACK . 2 EA
0995-11501 GENERATOR, RF 650 WATTS 1 EA
0997-10000 RELEASE NOTES, 4.03 1 EA
1090-0024 INSTR. UNCRATING PWR •. CONS. 1 EA
1090-0026 INSTR. UNCRATING MAIN CONS. 1 EA

0101-0044	ASSY, VACUUM HOSE STRIPPER	1 EA
0994-50009	CONNECTOR, VACUUM	1 EA
0994-70132	FITTING, FERRULESS TUBE	1 EA
0995-15003	NIPPLE, KF-40	1 EA
0995-15004	O-RING, KF-40 CENTERING	2 EA
0995-15005	CLAMP, KF40	2 EA
0995-15008	CLAMP, 2″ HOSE	2 EA
0995-15002	HOSE, 1-1/2″ X 6 F’ LONG	72 IN
0995-15006	HOSE, SPRING 1-1/2″	1 EA
0995-15084	TUBING, VACUUM HOSE 6′ LG	lEA
0101-0105	KIT,SHIP COOLER	1 EA
0992-50007	TUBING, 1/4″ POLYETHELENE	144 IN
0992-50008	TUBING; 3/8″ POLYETHELENE	360 IN
0994-70076	FITTING,TEE COOLANT	2 EA
0994-70077	FITTING,REDUCER COOLANT	2 EA

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Please contact us if you need Matrix 105 Spare Parts-Matrix 105 Spare Parts – Miscellaneous. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.

Matrix 105 Plasma Asher Descum

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range

Matrix 205 Plasma Asher Descum

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range

Matrix 303 Plasma Etch

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability | Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range

Matrix 403 Plasma Etch

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range

Matrix 10X 205 X03

The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.