Product Description
Main Console and Process Module Cables Harnesses
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| Part Number | Description | Qty | |
| **3 | 1070-0016 | CABLE,TRANSPORT CONTROL | 1 EA |
| **3 | 1070-0043 | CABLE,JUMP OPERATOR | 1 EA |
| **3 | 1070-0046 | HARNESS,CART RECORDER | 1 EA |
| **3 | 1070-0052 | CABLE,TRANSPORT CONTROL | 1 EA |
| **3 | 1070-0056 | CABLE,24″ O.I./CARD | 1 EA |
| **3 | 1070-0057 | CABLE, 20″ O.I./PLASMA | 1 EA |
| **3 | 1070-0071 | HARNESS,JUMPER PMI P19 | 1 EA |
| **3 | 1070-0073 | HARNESS,MAIN CONSOLE | 1 EA |
| ***4 | 0990-84001 | CONNECTOR, 6 PIN 22 AWG | 4 EA |
| ***4 | 0990-84002 | CONNECTOR, 10 PIN 22 AWG | 3 EA |
| ***4 | 0990-84004 | CONNECTOR, 8 PIN 22 AWG | 1 EA |
| ***4 | 0990-84014 | CONNECTOR, 3 PIN 22 AWG | 1 EA |
| ***4 | 0990-84017 | CONNECTOR, 8 PIN 18 AWG | 5 EA |
| ***4 | 0990-84018 | CONNECTOR, 5 PIN 22 AWG | 1 EA |
| ***4 | 0990-84019 | CONNECTOR, 4 PIN 18 AWG | 1 EA |
| ***4 | 0990-84020 | CONNECTOR, 9 PIN CPC | 1 EA |
| ***4 | 0990-84028 | CONNECTOR, 4 PIN 18 AWG | 1 EA |
| ***4 | 0990-84035 | CONNECTOR, 37 PIN CPC | 1 EA |
| ***4 | 0990-84036 | CONNECTOR,37 PIN CPC | 1 EA |
| ***4 | 0990-84039 | HOUSING, 3 PIN CONNECTOR | 1 EA |
| ***4 | 0990-84044 | CONNECTOR, 6 PIN MALE | 1 EA |
| ***4 | 0990-84045 | CONNECTOR,15 PIN non | l EA |
| ***4 | 0990-84046 | CONNECTOR, 2 PIN 22AWG | 2 EA |
| ***4 | 0990-84059 | COVER,15 PIN”D”CONNECTOR | 1 EA |
| ***4 | 0990-85001 | COVER,10 POS 100 MTA | 3 EA |
| ***4 | 0990-85002 | COVER, 8 POS.156 MTA | 5 EA |
| ***4 | 0990-85003 | COVER, 6 POS .100 MTA. | 4 EA |
| ***4 | 0990-85004 | COVER, 3 POS.100 MTA | 1 EA |
| ***4 | 0990-85008 | COVER, 5 POS.100 MTA | 1 EA |
| ***4 | 0990-85011 | COVER, 4 POS 18AWG .156 | 1 EA |
| ***4 | 0990-85012 | COVER, 8 POS 22 AWG 100 | 1 EA |
| ***4 | 0990-89003 | CONTACT, 16-18 AWG PIN | 37 EA |
| ***4 | 0990-89004 | CONTACT, 16-18 AWG SOCKET | 23 EA |
| ***4 | 0990-89005 | CONTACT, 20-24 AWG | 5 EA |
| ***4 | 0990-89007 | CONTACT, 18-22 AWG PIN | 4 EA |
| ***4 | 0990-89021 | CONTACT, 20-24 AWG | 12 EA |
| **3 | 1070-0076 | HARNESS,COOLING FNf | 1 EA |
| **3 | 1070-0078 | HARNESS, PROCESS MODULE | 1 EA |
| ***4 | 0990-84001 | CONNECTOR, 6 PIN 22AWG | 1 EA |
| ***4 | 0990-84002 | CONNECTOR, 10 PIN 22 AWG | 2 EA |
| ***4 | 0990-84003 | CONNECTOR, 10 PIN TWIN LEA | 2 EA |
| ***4 | 0990-84046 | CONNECTOR, 2 PIN 22 AWG | 1 EA |
| ***4 | 0990-84060 | SHIE::to, 11TYLAN11 MFC | 2 EA |
| ***4 | 0990-85001 | COVER, 10 POS ·100 MTA | 2 EA |
| ***4 | 0990-85003 | COVER, 6 POS 100 MTA | 1 EA |
| ***4 | 0990-85041 | COVER I 2 POS 100 MTA | 1 EA |
| ***4 | 0990-89001 | CONTACT, 20-24 AWG | 2 EA |
| ***4 | 0990-89002 | KEY, CONTACT ON | 4 EA |
| **3 | 1070-0080 | CABLE,PROCESS CONTROL/ | 1 EA |
| **3 | 1070-0081 | CABLE;,PROCESS.INTERFACE | 1 EA |
| **3 | 1070-0095 | HARNESS I PI TO MATCH | 1 EA |
| **3 | 1070-0108 | HARNESS; ISOLATION VALVE | 1 EA |
| **3 | 1070-0117 | CABLE, RS232 | 4 EA |
| **3 | 1070-0123 | CABLE, HEATER/THERMOSTAT | 1 EA |
| **3 | 1070-0140 | CABLE, CPU BUS | 1 EA |
| **3 | 1070-0175 | HARNESS, FLOW SWITCH 103 | 1 EA |
| **3 | 1070-0181 | CABLE, DC ORBITRANCONTROL | 1 EA |
| **3 | 1070-0208 | HARNESS, PNEUMATIC DOOR OP. | 1 EA |
| **3 | 1070-0246 | HARNESS, MANOMETER GROUND | 1 EA |
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Please contact us if you need Matrix 105 Spare Parts-Matrix 105 Miscellaneous Main console. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Matrix 105 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 205 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 303 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability | Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range
Matrix 403 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range
Matrix 10X 205 X03
The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.
