Product Description
AW-105R Plasma Asher Descum Equipment Spare Parts (Basic) Recommendation
| Item | P/N | Description | Qty |
| 1 | 0990-95010 | LAMP,PUSHBUTTON SWITCH | 5 |
| 2 | 0995-16521 | SOLENOID, ETO-3 | 2 |
| 3 | 0995-16527 | SOLENOID, ET-2M | 1 |
| 4 | 0101-0484 | ASSY, BELLOWS COMPRESSION | 1 |
| 5 | 0992-60149 | INSULATOR, BELLOWS MACOR | 1 |
| 6 | 0994-60005 | O’RING,RED SILICONE (door) | 5 |
| 7 | 0994-60006 | O’RING,RED SILICONE (reactor) | 5 |
| 8 | 0994-60007 | O’RING,RED SILICONE (bell jar) | 5 |
| 9 | 0994-60019 | O’RING,VACUUM VALVE | 5 |
| 10 | 0994-60029 | O’RING,VAC. VALVE POPPET | 5 |
| 11 | 0994-60050 | O’RING, CHUCK SEAL | 5 |
| 12 | 0994-60055 | O-RING SILICONE (lifter pins) | 3 |
| 13 | 0994-60062-AW | O-RING KALREZ (lifter pins) | 3 |
| 14 | 0994-60063 | O-RING KALREZ (chuck) | 1 |
| 15 | 0995-10597 | CYLINDER, PANCAKE | 1 |
| 16 | 0992-60094 | Ceramic Ring | 1 |
| 17 | 0992-60126 | Insulator, Lower Reactor | 1 |
| 18 | 0992-60135 | Pin Wafer Lifting | 3 |
| 19 | 0992-60147 | Chamber | 1 |
| 20 | 0992-60253 | Baffle, Qtz. Insulated Reactor | 1 |
| 21 | 0995-16512 | Bleed Valve | 1 |
| 22 | 0995-99777 | Door Cylinder | 1 |
| 23 | W01-00012-B | RF Matching Network (Include box and control boards) | 1 |
| 24 | S2100-1008-008 | PCA, Main Control Board | 1 |
| 25 | S2100-0105-019 | PCA, Robot Control Board | 1 |
| 26 | S2100-0105-010 | PCA, Distribution Board | 1 |
| 27 | 0995-99752 | Baratron,0-10Torr, VCR 1/2″ | 1 |
| 28 | A5-0602-A | Computer Board | 1 |
| 29 | A5-0603-A | CF Card, 64G | 1 |
| 30 | A5-1021 | Memory, 256M.DDR333.200PIN, Non-ECC | 1 |
Contact Us for More Information
Please contact us if you need Matrix 105 Spare Parts. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Matrix 105 Plasma Asher Descum
Matrix 205 Plasma Asher Descum
Matrix 303 Plasma Etch
Matrix 403 Plasma Etch
Matrix 10X 205 X03
The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.
