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Perkin-Elmer 2400, 4400, 4410, 4450 Series Upgrade & Retrofit Kits
Allwin21 provides upgrade kits for Perkin-Elmer 2400, 4400, 4410, 4450 Series sputtering deposition systems. The upgrade kits replace obsolete Auto Pump Down Controller (APC), Load Lock Controller (LLC), Digital Clock Timer (DCT), Carriage In/Out board, Throttle Valve Control System, Pressure Control System, PE Ion Gauge Controller (DGC, WRD), Sputter Head (Target selection, Shutter drive, Mode Selection) will be bypassed after upgrade. No wiring are placed. No changes to RF and DC power supplies
The upgrade can be performed on-site with minimal facility changes. Existing utility connections remain in place. The upgraded system provides modern PC-based control, graphical user interface, recipe storage, process data storage, diagnostics, improved reliability, and long-term support.
- Replace obsolete meters, guages
- Replace obsolete controllers, PCBs and electronics
- Improve system reliability and maintainability
- Add modern GUI, recipe management, and data storage
- Simplify troubleshooting and calibration
- Reduce downtime caused by obsolete components
- Extend the life of production-proven process platforms
- Add optional GEM/SECS II and advanced EOP functions
- Level 1 — Controller, PCB, MFCs and Allwin21 Software Upgrade
- Level 2 — Level 1 + Key Subsystem Replacement (Air-cooling RF Generator, New RF Matching, New DC Power, New Pulse DC, Loadlock Heating function, Reactor Heating function, Feed-through for reactor table, Plasma Etch function, RF Bias function, Reactive Sputter function,Alarm Light Tower etc.
| Comparing Item | New AccuSputter AW4450 | Upgraded Perkin-Elmer Systems | Original Perkin-Elmer Systems |
|---|---|---|---|
| Controller | New embedded PC | New embedded PC | Z-80 MPU |
| Monitor | 15″ Touch Screen | 15″ Touch Screen | N/A |
| Gas lines | New, MFCs | New, MFCs | Used or NA |
| RF Power | New, Air-Cooling | Used, Obsolete,Water Cooling. New Air Cooling – Level 2 | Used, Obsolete |
| DC Power | New | Used, Obsolete New, or Pulse DC – Level 2 | Used, Obsolete |
| RF interfere | No | No | Some time |
| Frame | New | Used | Used |
| User Interface | GUI | GUI | Text |
| Data Storage | Store in Hard Disk | Store in Hard Disk | None |
| Recipe Edit | Easy to edit with GUI | Easy to edit with GUI | N/A |
| Recipes | Unlimited | Unlimited | N/A |
| Online Help | Yes | Yes | None |
| Gas Calibration | Easy to do with GUI | Easy to do with GUI | None |
| Diagnostic Function | More functions and AD/DA, I/O hardware exposed for easier maintenance and trouble shooting | More functions and I/O hardware exposed for easier maintenance and trouble shooting | Limited |
| A/D Precision | 14-16bits | 14-16bits | 12bits |
| PCB | Only one, new, simple, much stable | Only one, new, simple | A few assembly, Obsolete, pain, connection issues |
| GEM/SEC II function (Option) | Optional | Optional | No |
| Alarm Light Tower | Yes | Yes-Level 2 | No |
| Vacuum Valves | New, MKS Throttle Valve | New- MKS Throttle Valve -Level 2 | No or Used |
| Vacuum Meters | New, MKS Baratron | New-MKS Baratron -Level 2 | No or Used |
| Chamber | New | Used | Used |
| O Rings | New | Used | Used |
| RF Matching | New | Used. New AW RF Matching – Level 2 | Used |
| Cables | New | Used | Used |
| Wires | New | Used | Used |
| Other Components | New | Used | Used |
| Stability | Much Better | Better | Limited |
| OEM Support | Yes | Limited | No |
Request an Upgrade Kit Review
Please provide the following equipment information and upgrade requirements. Based on your equipment condition, upgrade goals, and future plans, Allwin21 will review and recommend a suitable upgrade or retrofit solution.
Additional Upgrade Kit Keywords and Legacy Equipment References
Perkin-Elmer 2400 Upgrade, Perkin-Elmer 4400 Upgrade, Perkin-Elmer 4410 Upgrade, Perkin-Elmer 4415 Upgrade,Perkin-Elmer 4450 Upgrade, Perkin-Elmer 4480 Upgrade, TES PE-4400 Upgrade, TES PE-4410 Upgrade, TES PE-4415 Upgrade, TES PE-4450 Upgrade, SputterTech 4400 Upgrade, SputterTech 4410 Upgrade, SputterTech 4450 Upgrade, SputterTech 4415 Upgrade, Perkin-Eler Sputter Upgrade, Perkin-Eler Sputtering Deposition Equipment Upgrade, Perkin-Eler Sputter Retrofit, Perkin-Eler Sputter Refurbishment, Perkin-Eler Sputter Upgrade Kit, Perkin-Eler Sputter System Modernization, Sputter Deposition Equipment Upgrade Kit, Sputtering Deposition System Upgrade Kit, Semiconductor Equipment, Front-end process equipment.