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Gasonics 3000, 3010, L3510 Systems Upgrade Kits
Allwin21 provides upgrade kits for Gasonics Aura 3000, Gasonics Aura 3010, Gasonics L3510 plasma asher systems. The upgrade kits replace obsolete controllers, displays, electronics, PCBs, pressure control modules, temperature control modules, and other discontinued components while preserving the original process platform.
The upgrade can be performed on-site with minimal facility changes. Existing utility connections remain in place. The upgraded system provides modern PC-based control, graphical user interface, recipe storage, process data storage, diagnostics, improved reliability, and long-term support.
- Replace obsolete Z-80 controllers and displays
- Replace obsolete controller PCBs and electronics
- Replace obsolete Z-Bot
- Improve system reliability and maintainability
- Add modern GUI, recipe management, and data storage
- Simplify troubleshooting and calibration
- Reduce downtime caused by obsolete components
- Extend the life of production-proven process platforms
- Add optional GEM/SECS II and advanced EOP functions
- Level 1 — Controller, PCB, and Allwin21 Software Upgrade
- Level 2 — Level 1 + Compact Integrated Robotic Wafer Transfer
- Level 3 — Level 1 or Level 2 + Other Key components
| Comparing Item | Upgraded Systems | Original Systems |
|---|---|---|
| Wafer Transfer | Integrated Solid Robotic Wafer Transfer -Level 2 | Obsolete Orbit Z-bot Robot |
| Wafer transfer control | Robot controller with PC, more stable – Level 2 | Old control board |
| Cassette Station | Solid cassette station with sensors, no trouble shooting | Elevator station. Obsolete |
| Temperature Controller | Allwin21 Advanced Closeloop RTP Temperature control technology | Used |
| Controller | New embedded PC | Z-80 MPU |
| Monitor | 15″ Touch Screen | Old obsolete display |
| User Interface | GUI | Text |
| Data Storage | Store in Morden Hard Disk | Limited |
| Recipe Edit | Easy to edit with GUI | Old Method |
| Recipes | Unlimited | Limited |
| Online Help | Yes | None |
| Gas Calibration | Easy to do with GUI | Limited |
| Diagnostic Function | More functions and I/O hardware exposed for easier maintenance and trouble shooting | Limited |
| A/D Precision | 14-16bits | 12bits |
| PCB | Only one, new, simple, much stable | Used a few of PCBs, Obsolete, pain, connection issues |
| GEM/SEC II function (Option) | Optional | Limited |
| Stability | Much Better | Limited |
| Professional Vendor Support | Yes | No |
Request an Upgrade Kit Review
Please provide the following equipment information and upgrade requirements. Based on your equipment condition, upgrade goals, and future plans, Allwin21 will review and recommend a suitable upgrade or retrofit solution.
Additional Upgrade Kit Keywords and Legacy Equipment References
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