The current 610 RTP oven design is limited to the Time at Temperature limits listed below. High Temperature processing has many “Ins and Outs” of strategies and compromises. Be sure to let Allwin21 know the details of your process requirements. With the current oven design, customers wanting to use the 1050C to 1250C range of processing need to let Allwin21 know…
Time (sec) — the amount of time to elapse for this step. The time can be from 1 – 9999 seconds, in increments of 1 second. The software will restrict the maximum allowable time as the temperature increases (see table below, according to AG Associates specifications):
Temp/ Max Time/
Deg. C. Seconds
1250 120
1200 120
1150 120
1100 120
1050 120
1000 300
950 300
900 300
850 300
800 450
750 600
700 600
650 800
600 11200
550 1800
500 1800
450 2400
400 2400
350 5000
300 7200
200 9999 (maximum programmable time)
Basically the process duration is heavily depending on the cooling water / air flow rate and cabinet exhaust rate. Below time to temperature chart for our AW610 RTP was recommended to all users by Stanford Fab.
