AccuThermo AW 610M Spare Parts Price List

The prices below are subject to change without notice.

Item

P/N

Description

Unit Price

Qty

Amount

Spare Kit, Level 1

1

2451-0010-02

Lamp, 1200W 208V

$52.00

5

$260.00

2

2504-0070

O-Ring, Purge Inlet

$3.00

2

$6.00

3

2504-0160-AW1

O-Ring, Flange to Tube,Door to Flange

$15.00

4

$60.00

4

5101-0030

Fuse,1A 250V,Fst-Blo

$2.00

2

$4.00

5

5101-0090

Fuse,1/2A 250V,Fst-Blo

$2.00

2

$4.00

6

A5-0346

Fuse,10A 250V

$5.00

2

$10.00

Subtotal

 

Spare Kit, Level 2

7

2109-0050

Lampholder,Tung Halg,10A 600V

$30.00

2

$60.00

8

A5-0391

Valve Solenoid NC-2 way 3/8″     

$200.00

2

$400.00

9

A5-0138

BELLOWS VALVE    

$500.00

1

$500.00

10

A5-0182

Valve, 12VDC     

$55.00

2

$110.00

11

A5-0390

Flow Switch,3/8″ NPT,1-10LPM      

$285.00

1

$285.00

12

2901-0040

Digital Panel Meter Assy

$159.00

1

$159.00

13

5107-0010

Door Interlock Switch

$10.00

1

$10.00

14

5107-0020

Cabinet Interlock

$50.00

1

$50.00

15

5300-0060

Thermstat Interlock “A”

$25.00

1

$25.00

16

5300-0070

Thermstat overcool “B”

$25.00

1

$25.00

17

5300-0090

ThermstatOpen=150F CL=135F

$25.00

1

$25.00

18

7100-0326-01-AW

TC ASSEMBLY, T-SHAPE, QUARTZ      

$275.00

1

$275.00

19

7100-0874-11

ERP Pyro, Water Cooled

$6,800.00

1

$6,800.00

20

2100-0900-078

PCA, Main Control Board

$3,650.00

1

$3,650.00

21

2100-0900-054

PCA, Gas Control Board

$1,250.00

1

$1,250.00

Subtotal

 

Spare Kit, Level 3

22

A5-1001-02       

Contactor, 3-P

$280.00

1

$280.00

23

045-0119

RELAY, SOLID STATE, 240 VAC, 25A 

$60.00

6

$360.00

24

7400-0066-03

Quartz Isolation Tube with pyrometer window

$4,180.00

1

$4,180.00

25

7400-0082-01-4

6-inch tray for 4 to 6 inch wafers.

$1,815.00

1

$1,815.00

26

A4-0004-01

Quartz tray, Square

$2,090.00

1

$2.090.00

Subtotal