The prices below are subject to change without notice.
Item |
P/N |
Description |
Unit Price |
Qty |
Amount |
Spare Kit, Level 1 |
|||||
1 |
2451-0010-02 |
Lamp, 1200W 208V |
$52.00 |
5 |
$260.00 |
2 |
2504-0070 |
O-Ring, Purge Inlet |
$3.00 |
2 |
$6.00 |
3 |
2504-0160-AW1 |
O-Ring, Flange to Tube,Door to Flange |
$15.00 |
4 |
$60.00 |
4 |
5101-0030 |
Fuse,1A 250V,Fst-Blo |
$2.00 |
2 |
$4.00 |
5 |
5101-0090 |
Fuse,1/2A 250V,Fst-Blo |
$2.00 |
2 |
$4.00 |
6 |
A5-0346 |
Fuse,10A 250V |
$5.00 |
2 |
$10.00 |
Subtotal |
|
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Spare Kit, Level 2 |
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7 |
2109-0050 |
Lampholder,Tung Halg,10A 600V |
$30.00 |
2 |
$60.00 |
8 |
A5-0391 |
Valve Solenoid NC-2 way 3/8″ |
$200.00 |
2 |
$400.00 |
9 |
A5-0138 |
BELLOWS VALVE |
$500.00 |
1 |
$500.00 |
10 |
A5-0182 |
Valve, 12VDC |
$55.00 |
2 |
$110.00 |
11 |
A5-0390 |
Flow Switch,3/8″ NPT,1-10LPM |
$285.00 |
1 |
$285.00 |
12 |
2901-0040 |
Digital Panel Meter Assy |
$159.00 |
1 |
$159.00 |
13 |
5107-0010 |
Door Interlock Switch |
$10.00 |
1 |
$10.00 |
14 |
5107-0020 |
Cabinet Interlock |
$50.00 |
1 |
$50.00 |
15 |
5300-0060 |
Thermstat Interlock “A” |
$25.00 |
1 |
$25.00 |
16 |
5300-0070 |
Thermstat overcool “B” |
$25.00 |
1 |
$25.00 |
17 |
5300-0090 |
ThermstatOpen=150F CL=135F |
$25.00 |
1 |
$25.00 |
18 |
7100-0326-01-AW |
TC ASSEMBLY, T-SHAPE, QUARTZ |
$275.00 |
1 |
$275.00 |
19 |
7100-0874-11 |
ERP Pyro, Water Cooled |
$6,800.00 |
1 |
$6,800.00 |
20 |
2100-0900-078 |
PCA, Main Control Board |
$3,650.00 |
1 |
$3,650.00 |
21 |
2100-0900-054 |
PCA, Gas Control Board |
$1,250.00 |
1 |
$1,250.00 |
Subtotal |
|
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Spare Kit, Level 3 |
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22 |
A5-1001-02 |
Contactor, 3-P |
$280.00 |
1 |
$280.00 |
23 |
045-0119 |
RELAY, SOLID STATE, 240 VAC, 25A |
$60.00 |
6 |
$360.00 |
24 |
7400-0066-03 |
Quartz Isolation Tube with pyrometer window |
$4,180.00 |
1 |
$4,180.00 |
25 |
7400-0082-01-4 |
6-inch tray for 4 to 6 inch wafers. |
$1,815.00 |
1 |
$1,815.00 |
26 |
A4-0004-01 |
Quartz tray, Square |
$2,090.00 |
1 |
$2.090.00 |
Subtotal |
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