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Tegal 901e, Tegal 903e, Tegal 9000, Tegal i901e, i903e Systems Upgrade Kits
Allwin21 provides upgrade kits for Tegal 901e, Tegal 903e, Tegal 9000, Tegal i901e, and i903e plasma etcher systems. The upgrade kits replace obsolete controllers, displays, electronics, PCBs, pressure control modules, temperature control modules, and other discontinued components while preserving the original process platform.
If the original Tegal system is in working condition, the standard Allwin21 controller/electronics and robotics upgrade can normally be performed on-site with minimal facility changes. Existing utility connections can normally remain in place.
The upgraded system provides modern PC-based control, graphical user interface, recipe storage, process data storage, diagnostics, improved reliability, and continued Allwin21 technical, service, and spare-parts support.
- Replace original Tegal DACSCAN controller/electronics
- Replace obsolete PCBs and electronics if necessary
- Improve system reliability and maintainability
- Add modern GUI, recipe management, and data storage
- Simplify troubleshooting and calibration
- Reduce downtime caused by obsolete components
- Extend the life of production-proven process platforms
- Add optional GEM/SECS II and advanced EOP functions
- Continued Allwin21 technical, service, and spare-parts support after upgrade
- Level 1 — Controller, Allwin21 Main PCB, and Allwin21 Software Upgrade
- Level 2 — Level 1 + Compact Integrated Robotic Wafer Transfer
- Level 3 — Level 1 or Level 2 + Key Subsystem Replacement (Air-Cooled RF Generator, New RF Matching, New EOP Function, New DC Power, New AC Power, Air-Cylinder Adjustment for Pins, etc.)
| Comparing Item | New AW-90xeR | Upgraded Tegal 90xe | Original Tegal 90xe |
|---|---|---|---|
| Wafer Transfer | Compact Integrated Solid Robotic Wafer Transfer | Compact Integrated Solid Robotic Wafer Transfer – Level 2 | Belt Shuttle Wafer Transfer |
| Wafer Transfer Control | Robot controller with PC, more stable | Robot controller with PC, more stable – Level 2 | Old obsolete control boards |
| Cassette Station | Solid cassette station with sensors, simplified troubleshooting | Elevator station for Level 1. Obsolete. | Elevator station. Obsolete. |
| Wafer Aligner | Yes, improved wafer handling performance | N/A for Level 1 | N/A |
| Frame | New | Used | Used |
| Controller | New embedded PC | New embedded PC | Obsolete DACSCAN |
| Monitor | LCD | LCD | Old obsolete CRT display |
| User Interface | GUI | GUI | Text |
| Data Storage | Stored on hard disk | Stored on hard disk | None |
| Recipe Edit | Easy to edit with GUI | Easy to edit with GUI | Difficult |
| Recipes | Unlimited | Unlimited | Only 20 |
| Online Help | Yes | Yes | None |
| Gas Calibration | Easy to perform with GUI | Easy to perform with GUI | Limited |
| Diagnostic Function | More functions with exposed A/D, D/A and I/O hardware for easier maintenance and troubleshooting | More functions with exposed I/O hardware for easier maintenance and troubleshooting | Limited |
| A/D Precision | 14-16 bits | 14-16 bits | 12 bits |
| EOP Function (Option) | Allwin21 New Method | Allwin21 New Method | Original legacy method |
| GEM/SECS II Function (Option) | Optional | Optional | No |
| Alarm Light Tower | Yes | Optional | No |
| Vacuum Valves | New | Used | Used |
| Vacuum Meters | New | Used | Used |
| MFC | New | Used | Used |
| Gas Lines | New | Used | Used |
| Chamber | New | Used | Used |
| Chuck | New | Used | Used |
| O-Ring | New | New | Used |
| RF Power | New, Air-Cooled | Used, Water-Cooled. New RF Power Optional – Level 3 | Used, Water-Cooled |
| RF Matching | New | Used. New RF Matching Optional – Level 3 | Used |
| DC Power | New | Used. New DC Power Optional – Level 3 | Used |
| AC Power | New | Used. New AC Power Optional – Level 3 | Used |
| Air-Cylinder Adjustment for Pins | Yes | Optional – Level 3 | No |
| Cables | New | Used | Used |
| Wires | New | Used | Used |
| Other Components | New | Used | Used |
| Stability | Much Better | Better | Limited |
| Allwin21 Support | Yes | Yes, for Allwin21 upgraded components and supported system functions | Limited |
Working Equipment — On-Site Upgrade: If the original Tegal system is in working condition, Allwin21 can normally perform the standard controller/electronics and robotics upgrade at the customer’s site.
Non-Working Equipment / Major Repair / New Functions — Ship to Allwin21: If the original system is not working, has missing or damaged parts, requires significant repair, or requires major new functions, we recommend shipping the complete system to Allwin21.
Combining extensive troubleshooting, repair, parts replacement, system modification, and an upgrade at the customer site can be complicated and inefficient. At Allwin21, our engineers can evaluate the actual equipment condition, repair or refurbish the system, install the upgrade and new functions, integrate all subsystems, and fully test the complete equipment before shipment back to the customer.
For non-working or modified systems, Allwin21 can provide an initial estimated quotation based on the available information. The final scope and quotation may be revised after the equipment is received and evaluated.
Request an Upgrade Kit Review
Please provide the following equipment information and upgrade requirements. Based on your equipment condition, upgrade goals, and future plans, Allwin21 will review and recommend a suitable upgrade or retrofit solution.
Additional Upgrade Kit Keywords and Legacy Equipment References
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