Tegal 903e Basic System Configuration
Proven reactor chamber assembly with upper and lower electrode.
Tegal 903e Wafer Sizes(Customized)
- Handles 75mm,100mm, 125mm, 150mm Silicon or GaAs wafers ,round.
Tegal 903e Wafer Transfer
- Original belt wafer transfer with shuttle or robotic wafer transfer (Optional)
Tegal 903e Gas Control
- 4 independent gas line with 4 MFCs (Customized)
Substrate Positioning
- Processing of substrate directly on cooled wafer chuck
Tegal 903e Matching Network
- 13.56MHz fully automated RF matching network
Tegal 903e Solid State RF Generator
- ENI ACG-10B 13.56MHz or Equivalent
Tegal 903e AC/DC Power box
- Original AC/DC power box
Pressure Control
- Accurate, closed-loop pressure control with UPC and MKS Baratron capacitance manometer
Tegal 903e Display
- Touch screen monitor or LCD Monitor with PC.
New Tegal 903e Control Systems from Allwin21 Corp.
- Advanced AW Software control the following.
- Gas flows: settings for up to 4 independent mass flow controller values
- RF power: 50 to 1000 watts
- Process pressure
- Absolute endpoint time
- Timed cycles up to 4 hour each
- Wafer pins up/down
- Optical Endpoint Parameters
- Automated calibration of all subsystems
- Trouble shooting to subassembly levels
- Programmed comprehensive calibration and Built-in diagnostic functions
- Recipe creation for full automatic wafer processing
- Automatic decline of improper recipes and process data
- Multi level pass word protections
- Storage of multiple recipes and system functions
- Real-Time process data acquisition, display ,analysis
- Real-Time graphics display
- Process Data and Recipe storage on a hard drive
