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OIS-Three /OIS-Three Plus

Optorun Main Products

Category: Optorun Tags: Component, Ion Source

Description

Product Description

RF Ion Source

OIS-Three/OIS-Three Plus has an incomparable high power beam to any other ion beam assisted deposition systems.
Uniform irradiation covers an entire dome with 1600 in diameter.
OIS-Three/OIS-Three Plus is most suitable for mass production of sophisticated optical filters when equipped with OTFC-1800.

Key Feature

Newly developed grid has long life.
Long life and less contamination.
Higher uniformity of ion density with a wide coverage over a dome with 1600mm in diameter.
Great stability and non-stop operation for longer hours.

Specifications

Model	OIS-Three	OIS-Three Plus
Dimensions	φ 390mm × 215mm(H)
Grids	φ 23cm three molybdenum grids
Beam Voltage	100V – 1500V
Max Beam Current	1800mA	2400mA
Acc Voltage	100V – 1000V
Max RF Power	2000W
Gas Flow Rate	20sccm – 40sccm (argon) 40sccm – 80sccm (oxygen)
Pressure	5 × 10^-2 Pa
Water-cooling	RF coil and beam unit

Neutralizer

Dimensions	φ 7cm × 12cm
Max Emission Current (max）	2800mA	3000mA
Max RF Power	150W
Gas Flow Rate	5sccm to 10sccm (argon only)

Semi Membership

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OIS-Three /OIS-Three Plus

Product Description

RF Ion Source

Key Feature

Specifications

Neutralizer

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