OIS-Three OIS-Three Plus RF Ion Source

OIS-Three /OIS-Three Plus

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Product Description

RF Ion Source

OIS-Three/OIS-Three Plus has an incomparable high power beam to any other ion beam assisted deposition systems.
Uniform irradiation covers an entire dome with 1600 in diameter.
OIS-Three/OIS-Three Plus is most suitable for mass production of sophisticated optical filters when equipped with OTFC-1800.

Key Feature

  • Newly developed grid has long life.
  • Long life and less contamination.
  • Higher uniformity of ion density with a wide coverage over a dome with 1600mm in diameter.
  • Great stability and non-stop operation for longer hours.


Model OIS-Three OIS-Three Plus
Dimensions φ 390mm × 215mm(H)
Grids φ 23cm three molybdenum grids
Beam Voltage 100V – 1500V
Max Beam Current 1800mA 2400mA
Acc Voltage 100V – 1000V
Max RF Power 2000W
Gas Flow Rate 20sccm – 40sccm (argon)
40sccm – 80sccm (oxygen)
Pressure 5 × 10-2 Pa
Water-cooling RF coil and beam unit


Dimensions φ 7cm × 12cm
Max Emission Current (max) 2800mA 3000mA
Max RF Power 150W
Gas Flow Rate 5sccm to 10sccm (argon only)