OIS-CDM

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Product Description

Ion Current Density Meter

OIS-CDM can measure the ion current density of ion source.
It is automatically measurable with a option dedicated program.

Specifications

Source voltage AC 100 V ± 15 %
Bias Power (inside) 0 to ± 60 V/0.5 A
Standard measurement range ± 199.99 mA to ± 1.9999 mA
Accessories Gauge head, Cable, Feedthrough
Standard gauge head φ30 mm (φ8 mm, Measurement plane), 10 pcs
Scanning points 32 points
Measurements 480 × 99 × 330 mm