Product Description
Ion Current Density Meter
OIS-CDM can measure the ion current density of ion source.
It is automatically measurable with a option dedicated program.
Specifications
Source voltage | AC 100 V ± 15 % |
Bias Power (inside) | 0 to ± 60 V/0.5 A |
Standard measurement range | ± 199.99 mA to ± 1.9999 mA |
Accessories | Gauge head, Cable, Feedthrough |
Standard gauge head | φ30 mm (φ8 mm, Measurement plane), 10 pcs |
Scanning points | 32 points |
Measurements | 480 × 99 × 330 mm |