Direct Optical Monitor
DHOM-T monitors directly, in real time, the optical film deposited on the substrate mounted on a rotating dome in its deposition process.
Monitoring wavelength range is 350-1100 nm or 350 – 2400 nm.
- Direct monitoring of the optical thickness of the sample mounted on rotating dome
- Variable and readily adjustable monitoring position
- Conventional indirect monitoring system optionally installed in the same coater, and direct or indirect monitoring system optionally chosen for each film layer
|Wavelength range||350 ～ 1100nm||350 ～ 2400nm|
|Light Source||Halogen lamp|
|Power Requirements||AC100V ± 10%, 50/60Hz|