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Gasonics Aura 3010 Plasma Asher

FAQ on Rapid Thermal Processing Systems

Rapid Thermal Process

AccuThermo AW610M

1st Choice • ~6″ Desktop RTP

AccuThermo AW820M

1st Choice • ~8″ Atmospheric RTP

AccuThermo AW820R

1st Choice • 3″~8″ Automatic RTP

AccuThermo AW820V

~8″ Vacuum RTP

AccuThermo AW820RV

3″~8″ Auto Vacuum RTP

AccuThermo AW1230R

8″~12″ Automatic RTP

Plasma Ash / Descum

2″~6″ Downstream Asher

4″~8″ Downstream Asher

~8″ Semi-auto Asher, low cost

Plasma Etch / RIE

AW-901eR, AW-903eR

3″~6″ Plasma Etcher / RIE

2″~6″ Downstream Etcher

Sputter Systems

AccuSputter AW4450

~8″ Semi-Auto Sputter Deposition

AWgage-150,AWgage-200

2″~8″ Thickness / Resistance