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Oxford 80+ RIE PECVD

ByPlasma Etch RIE Equipment, Upgrade Service

Model: Oxford 80+

Category: RIE/PECVD

OEM: Oxford

Condition: Refurbished with Allwin21 new PC controller. Photo is only for reference.

Specifications: OEM’s

Warranty: 6 months

Location: CA, USA

Valid Time: Subject to prior sale.

Contact Us for More Information

Oxford

Tegal 915 Tegal 965 Upgrade
Plasma-Therm 790 720 730 RIE PECVD

Rapid Thermal Process


● AW610M
● AW820M
● AW820R

Plasma Ash & Descum


● AW-105R
● AW-10R
● AW-B3000

Plasma Etch RIE


● AW-901eR
● AW-903eR
● AW-303R

Sputter Deposition


● AW4450

Metal Film Metrology


● AWgage 150
● AWgage 200

RTP Retrofit & Upgrade

  • AG Associates Heatpulse RTPs
  • AG Associates Heatpulse 610
  • AG Associates Heatpulse 410
  • AG Associates Heatpulse 210
  • MPT RTP-600S
  • MPT RTP-600XP
  • MPT RTP-800XP
  • Link

Asher Retrofit & Upgrade

  • Matrix 105, 104, 106, 205
  • Branson/IPC 2000, 3000, 4000
  • Gasonics Aura 1000
  • Gasonics Aura 2000-LL
  • Gasonics Aura 3000
  • Gasonics Aura 3010
  • Gasonics L3510
  • Link

Etcher Retrofit & Upgrade

  • Tegal 901e, 903e, 915, 965
  • Matrix 303, 302, 403
  • Branson/IPC 2000, 3000, 4000
  • Plasma-Therm 700, 720, 730, 740, 790
  • Lam Research AutoEtch 490,590,690,790
  • Lam Rainbow 4400,4500,4600,4700 Series
  • Oxford Plasmalab 80, 133, 100, 800
  • Link

Sputter Retrofit & Upgrade

  • Perkin-Elmer 2400,4400,4410,4450
  • MRC 603, 643, 903, 923, 943
  • TES 600, 900, 4400, BJD-1800
  • SputterTech 4410, 4450
  • CPA 4400, 4450
  • 2ndSource 2400, 4400,4410,4450
  • Temescal BJD-1800,FC-1800 Evaporator
  • Link

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