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Allwin21 Corp. Rapid Thermal Process Plasma Asher Descum Etch RIE Sputter Deposition Equipment

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AW-900-714-H.AW610 Service Manual

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AW-900-714-H.AW610 Service Manual

AW-900-714-H.AW610 Service Manual

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Rapid Thermal Process

● AW610M

● AW820M

● AW820R

Plasma Ash & Descum

● AW-105R

● AW-10R

● AW-B3000

Plasma Etch RIE

● AW-901eR

● AW-903eR

● AW-303R

Sputter Deposition

● AW4450

Metal Film Metrology

● AWgage 150

● AWgage 200

RTP Retrofit & Upgrade

AG Associates Heatpulse RTPs
AG Associates Heatpulse 610
AG Associates Heatpulse 410
AG Associates Heatpulse 210
MPT RTP-600S
MPT RTP-600XP
MPT RTP-800XP
Link

Asher Retrofit & Upgrade

Matrix 105, 104, 106, 205
Branson/IPC 2000, 3000, 4000
Gasonics Aura 1000
Gasonics Aura 2000-LL
Gasonics Aura 3000
Gasonics Aura 3010
Gasonics L3510
Link

Etcher Retrofit & Upgrade

Tegal 901e, 903e, 915, 965
Matrix 303, 302, 403
Branson/IPC 2000, 3000, 4000
Plasma-Therm 700, 720, 730, 740, 790
Lam Research AutoEtch 490,590,690,790
Lam Rainbow 4400,4500,4600,4700 Series
Oxford Plasmalab 80, 133, 100, 800
Link

Sputter Retrofit & Upgrade

Perkin-Elmer 2400,4400,4410,4450
MRC 603, 643, 903, 923, 943
TES 600, 900, 4400, BJD-1800
SputterTech 4410, 4450
CPA 4400, 4450
2ndSource 2400, 4400,4410,4450
Temescal BJD-1800,FC-1800 Evaporator
Link

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