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Allwin21 Corp.
Rapid Thermal Process Plasma Asher Descum Etch RIE Sputter Deposition Equipment
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Rapid Thermal Process
AW 610M ~6″
AW820M~8″
AW820V ~8″
RF DC Sputter Deposition
AW4450 ~6″,8″
Optorun PVD Tools
Plasma Ash & Descum
AW-105R ~6″
AW-B3000 ~6″,8″
AW-10R ~8″
AW-1008 ~6″
Plasma Etch RIE
AW-901e ~ 6″
AW-903eR ~6″
TTW AW-901eR ~6″
TTW AW-903eR ~6″
AW-303R ~6″
AW-2001R ~6″
Metal Film Metrology
AWgage-150 ~6″
AWgage-200 ~8″
UPGRADE
AG ASSOCIATES RTP
HEATPULSE 210
MINIPULSE 310
HEATPULSE 410
HEATPULSE 610
HEATPULSE 610I
MPT RTP
RTA-600S RTA-600XP
RTA-800S RTA-800XP
MPT RTP-3000
PERKIN ELMER Sputter
Perkin-Elmer 2400
Perkin-Elmer 4400
Perkin-Elmer 4410
Perkin-Elmer 4450
Perkin-Elmer 4480
MRC 6X3 9X3 Sputter
MRC 943 Sputter
MRC 603 Sputter
MRC 643 Sputter
MRC 903 Sputter
TEGAL Asher Etcher
Tegal 915 Tegal 965
Tegal 901e
Tegal 903e
Tegal 981e
Tegal 983
MATRIX Asher Etcher
Matrix 1XX Series
Matrix 2XX Series
Matrix 3XX Series
Matrix 4XX Series
Matrix 1XXX Series
BRANSON Asher Etcher
Branson/IPC 2000 Series
Branson/IPC 3000 Series
Branson/IPC 4000 Series
LAM AUTOETCH X90
Lam AutoEtch 490
Lam Autoetch 590
Lam AutoEtch 690
Lam AutoEtch 790
Lam Rainbow 44XX
Lam Rainbow 4400 4420 4428
Lam Rainbow 4500 4520 4528
Lam Rainbow 4600 4620 4628
Lam Rainbow 4700 4720 4728
Gasonics Asher Etcher
GASONICS AURA 1000
GASONICS AURA 3010
GASONICS L3510
Gasonics Aura 2000LL
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A9-0716-C1.AW810M TehcnicalManual
By
A9-0716-C1.AW810M TehcnicalManual
A9-0716-C1.AW810M TehcnicalManual
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