RFQ – Plasma Etch RIE Systems

Please help fill in the following Customer Survey Form for suitable Plasma Etch RIE model and configuration for your applications. Some items allow multiple selections with Ctrl Key. Appreciate your time. Thank you very much.


1. Your Name(Required):

2. Your Email(Required):

3. Your Company Name(Required):

4. Company Address:

5. Which model are you interested in?


6. Purchase Schedule(Required):


7. Budget(Required):


8. Substrate Maximum Size(Required):


9. Substrate Maximum Thickness(Required):


10. Substrate Material(Required):
 Si SiC GaAs GaN GaInP InP Others Not sure

11. Substrate Shape(Required):
 Round Square Rectangle Abnormity Others Not sure

12. Amount of Gas lines(Required):


13. Etch Material (Required):

 Nitride Silicon Dioxide Polysilicon Refractory metal silicides Barrier-metal/alloys Metal lead(Al,Al-Alloy with silicon) Others Not sure

14. Special Requirements:

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