HS-Matrix

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1st Choice • ~6″ Desktop RTP

1st Choice • ~8″ Atmospheric RTP

1st Choice • 3″~8″ Automatic RTP

~8″ Vacuum RTP

3″~8″ Auto Vacuum RTP

8″~12″ Automatic RTP

2″~6″ Downstream Asher

4″~8″ Downstream Asher

~8″ Semi-auto Asher, low cost

3″~6″ Plasma Etcher / RIE

2″~6″ Downstream Etcher

~8″ Semi-Auto Sputter Deposition

2″~8″ Thickness / Resistance