Branson/IPC L3100/3 Barrel Resist Strippers:
Manufacturer: Branson/IPC
Condition: Fully Refurbished and Upgraded by Allwin21
Wafer Size: Small~8″Capability
Wafer loading: Manually
Plasma Power: RF,13.56MHz
Type: Barel/Batch Wafers Process,Desktop OR Stand Alone
Gas Lines: 1 ~ 3 lines capability with customized MFCs range
All our Branson/IPC 3000 go through a series of rigorous tests which are documented, standardized, and certified by performance and reliability standards. By strictly following these procedures, the customer receives guaranteed rapid start-up, lifecycle reliability, and proven process performance.
Branson/IPC 3000 Plasma Asher Key Features:
- Fully refurbished BRANSON/IPC 3000 Barrel Plasma Asher Descum Stripper equipment with One Quartz Chamber reaction chamber for 2 ” to 8 ” substrate.
- Up to three gas lines with three MFC(Customized)
- One New Computer with touch screen.
- One New Controller Box
- One New Touch Screen Monitor with keyboard, mouse.
- One 13.56 MHz ENI RF Generator or Equivalent for up to 1200W
- New Allwin21 Corp proprietary AW software with PC control for Branson/IPC 3000/2000
- After upgraded with PC control, it can do different process control timers, gas flow and power settings.
- Baratron Gauge to read the pressure to keep the process repeatable
- Throttle valve to control the pressure to keep the process repeatable
Key Features of Allwin21 AW-B3000 System Control for Branson/IPC 3000 Plasma Asher:
- Maintenance, Manual, Semi Automatic and Full Automatic operation modes
- Automated calibration of all subsystems
- Trouble shooting to sub-assembly levels
- Programmed comprehensive calibration and diagnostic functions
- Recipe creation for full automatic wafer processing
- Automatic decline of improper recipes and process data
- Multi level password protections
- Storage of multiple recipes and system functions
- Real-Time process data acquisition,display ,analysis
- Real-Time graphics user display (GUI)
- Process Data and Recipe storage on a hard drive
- GEM/SEC II functions (optional)
- ENI RF Generator instead of the original obsolete RF Generator
- New Controller box instead of the original controller