Product Description
Perkin-Elmer Sputtering Systems Spare Parts
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| 716-710-000 | SEE 720-710-000 |
| 716-710-000 | SEE 720-710-000 |
| 720-013-000 | GEAR, SHUTTER DRIVE |
| 720-016-000 | INSULATOR, MACOR, TABLE WATER TUBE |
| 720-028-000 | WATER MANIFOLD, 2400 J |
| 720-031-000 | COLLAR, SHUTTER DRIVE 44XX |
| 720-059-000 | BACKING PLATE, 6″ RF DIODE |
| 720-060-000 | SEALING PLATE, 6″ RF DIODE |
| 720-145-000 | DIODE ASSEMBLY, 6″ RF |
| 720-192-010 | DARK SPACE SHIELD, 8″ RF/DC |
| 720-193-000 | GROUND RING, 8″ |
| 720-205-040 | SHUTTER, VANE, ROUND, MOLY |
| 720-205-041 | SHUTTER, VANE, ROUND, SS |
| 720-261-000 | INSULATOR, CERAMIC, 6″ RF |
| 720-384-000 | INCLUDED IN 300-900-000 |
| 720-448-000 | SEE 721-242-1000 |
| 720-470-020 | INSULATOR, 2400 8J TYPE |
| 720-513-000 | BLANK-OFF, 8″ |
| 720-605-000 | J-ARM, HEATED |
| 720-664-000 | INSULATOR, CERAMIC, 8″ RF |
| 720-710-000 | CAM, SHUTTER DRIVE, 44XX |
| 720-839-000 | CAPACITOR, TUNING |
| 721-027-000 | FEEDTHROUGH, 2400-8L, LOAD LOCK |
| 721-242-000 | L-ARM, HEAT/COOL |
| 721-242-1000 | J-ARM, SHORT/MEDIUM/LONG |
| 721-280-010 | TABLE SHAFT, 2400 |
| 721-304-000 | DRIVE BUSHING, BEARING HOUSING |
| 721-309-000 | DRIVE PIN, BEARING HOUSING |
| 721-317-000 | DRIVE PULLEY, BEARING HOUSING |
| 721-320-000 | WATER MANIFOLD, 2400 L |
| 721-369-000 | TRANSFORMER, IGNITER FILAMENT |
| 721-402-000 | SEE 721-242-1000 |
| 721-568-000 | IGNITER PC BOARD, REFURB |
| 721-568-001 | IGNITER PC BOARD, REFURB, TRADE-IN |
| 700-038-000 | LN2 SENSOR |
| 700-039-000 | J40 SWITCH COVER |
| 720-026-000 | CONDUCTOR 2400 J-ARM |
| 720-065-000 | INSULATOR, DELRIN 6″ RF CATHODE |
| 720-097-010 | SHAFT ASSEMBLY |
| 720-105-000 | BEARING HOUSING |
| 720-119-000 | HUB, SHUTTER |
| 720-120-020 | ARM, SHUTTER-2400 |
| 720-123-020 | SHUTTER, SHAFT FULL CIRCLE |
| 720-129-000 | HOUSING, BRG, SHUTTER |
| 720-156-000 | SCREW, SET, RETAINING |
| 720-192-020 | STANDOFF, BEAM SHAPER 1.25 IN SPECIAL |
| 720-193-001 | SPACER SCREW SET |
| 720-200-010 | TOP PLATE 4400 |
| 720-231-000 | COLLAR , SHAFT SHUTTER |
| 720-252-000 | INSERT, INSULATOR 6″ RF CATHODE |
| 720-474-000 | VANE SHUTTER DISK |
| 720-516-000 | HOLE COVER – 8.875″DIA. |
| 720-546-000 | SHAFT SHUTTER |
| 720-634-000 | SHAFT WATER LINE |
| 720-640-000 | FLANGE. MODIFIED TABLE UP DOWN |
| 720-660-000 | TARGET NUT 6″ RF CATHODE |
| 720-660-020 | COUPLER, SHAFT DELRIN |
| 720-664-00 | INSULATOR, 8″ RF CATHODE |
| 720-666-020 | COUPLING |
| 720-693-000 | TABLE GROUND DISH |
| 720-719-000 | ARM TRIP SWITCH, BRASS NUT |
| 720-776-000 | VAR HOR SPLIT POWER CONTROL |
| 720-830-000 | RF INSULATOR |
| 720-898-000 | ACME NUT MODIFIED |
| 720-899-000 | SCREW JACK |
| 720-909-000 | STANDOFF, BEAMSHAPER 1.17 |
| 720-909-020 | STAND OFF, BEAM SHAPER 1.25 |
| 721-058-000 | CABLE ASSY. RF 10 FT |
| 721-059-000 | CABLE ASSY. RF 6 FT |
| 721-061-000 | CHOKE, HEATER J |
| 721-310-000 | SWITCH MOUNT |
| 721-378-000 | GEAR BOX MODIFIED |
| 721-379-000 | A-JOINT MODIFICATION |
| 721-384-000 | BEARING, THRUST, RULON LOCK VALVE |
| 721-567-000 | IGNITOR BOARD |
| 760-000-200 | SCALE, METER 0-500VDC |
| 760-000-300 | SCALE, METER 0-500X10VDC |
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PLEASE CONTACT US IF YOU NEED PERKIN-ELMER SPUTTERING SYSTEMS SPARE PARTS.
Allwin21 Corp. has been focusing on providing solutions and enhancements to Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480 used sputter deposition semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC and new critical components. We rebuild AccuSputter AW 4450 Series Sputter Deposition systems with our own integrated process control system, giving our customers the tools to achieve a production edge at very low cost impact.
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 6 inch | Wafer loading: Manually, with load lock | Cathodes: Circle Shape/4″~6″/Up to 4 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small~8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 4480 Sputter
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: 4~ 6 inch | Wafer loading: Automatic, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 44XX Upgrade Kits
The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original PE sputter system.
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