Product Description
Perkin-Elmer Sputter Spare Parts
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
| 220-900-400 | PALLET, MOLY, 6″ WAFERS, 7 WAFERS |
| 220-960-600 | IGNITER FEEDTHROUGH, |
| 220-960-610 | BIMBA REED SWITCH |
| 220-967-200 | PROGRAMMABLE POWER STABILIZER |
| 221-014-100 | VIEW PORT, — USED |
| 221-041-100 | BEARING HOUSING ASSY, 24XX TYPE |
| 221-048-000 | IGNITER FILAMENT |
| 221-079-600 | RF TRANSMISSION CLAMP, AL, NO MULTILAM |
| 221-079-700 | RF TRANSMISSION CLAMP, BRASS, RF FINGERS |
| 221-169-300 | UNIFORMITY SHAPER, 8″ RF MAGNETRON |
| 221-180-200 | SHUTTER, DELTA PLUS SHAPER ASSY |
| 221-190-300 | RETAINING SCREW, RF MAG/DIODE |
| 221-190-400 | RETAINING NUT, RF MAG/DIODE |
| 221-190-500 | DIODE ASSEMBLY, 8″ RF |
| 221-190-600 | BACKING PLATE, 8″ RF |
| 221-190-700 | SEALING PLATE, 8″ RF |
| 221-198-310 | MAGNET ASS, 8″ RF |
| 221-198-311 | MAGNET ASSY, 8″ RF, NO MAGNETS |
| 221-198-800 | UNIFORMITY SHAPER, 8″ DC MAGNETRON |
| 221-207-600 | INSULATOR, TABLE / GROUND DISH SPACER |
| 221-246-800 | TABLE TOP ASSEMBLY, — USED |
| 221-246-900 | TABLE WATER TUBE ASSY, 2400 TYPE |
| 221-247-200 | INSULATOR, TABLE, SPLIT |
| 221-247-300 | INSULATOR, TABLE, SOLID |
| 221-249-400 | BACKING PLATE, 8″ DC MAGNETRON |
| 221-249-500 | SEALING PLATE, 8″ DC MAGNETRON |
| 221-250-100 | MAGNET ASSY, 8″ DC |
| 221-250-101 | MAGNET ASSY, 8″ DC, NO MAGNETS |
| 221-250-102 | MAGNETS, 8″ |
| 221-250-200 | INSULATOR, CERAMIC, 8″ DCM |
| 221-250-300 | MAGNETRON ASSEMBLY, 8″ DC |
| 221-250-400 | ADJUSTMENT RING, 8″ DCM |
| 221-250-700 | RAIL ASSEMBLY, CHAMBER, FRONT |
| 221-251-200 | RAIL HOUSING AND SPROCKET |
| 221-251-400 | SPROCKET, IDLER, SEE ALSO 300-500-110 |
| 221-251-600 | IDLER SHAFT, SEE ALSO 300-500-110 |
| 221-260-900 | RAIL BEARING SHAFT |
| 221-261-000 | RAIL, DRIVE SHAFT ADAPTER |
| 221-261-300 | RAIL ASSEMBLY, CHAMBER, REAR |
| 221-261-400 | RAIL DRIVE WHEEL ASSY, CHAMBER |
| 221-266-500 | MEISSNER TRAP |
| 221-270-700 | PALLET, MOLY, 5″ WAFERS, 10 WAFERS |
| 221-271-900 | SEE 221-385-700 |
| 221-273-700 | PALLET, MOLY, TWEEZER GROOVE WITH LIP |
| 221-273-900 | TABLE DRAW BAR, UPPER |
| 221-274-000 | TABLE DRAW BAR HOUSING |
| 221-274-900 | GASKET, LL / CH |
| 221-275-000 | LOAD LOCK DOOR ASSEMBLY |
| 221-275-400 | INCLUDED IN 300-500-200 |
| 221-275-500 | INCLUDED IN 300-500-200 |
| 221-275-900 | CONNECTOR LINKS, LL DOOR |
| 221-279-500 | SEE 300-500-100 |
| 221-279-600 | RAIL DRIVE FEEDTHROUGH |
| 221-279-700 | RAIL DRIVE FEEDTHROUGH SHAFT, LL |
| 221-279-800 | RAIL FEEDTHROUGH FLANGE INSERT |
| 221-279-900 | RAIL FEEDTHROUGH FLANGE, LL |
| 221-281-200 | FEEDTHROUGH, LOAD LOCK ELEVATOR |
| 221-281-500 | SEE 300-500-090 |
| 221-281-700 | RAIL DRIVE FEEDTHROUGH SHAFT, CHAMBER |
| 221-282-500 | TRANSMISSION LINE, RF, 33.5″ |
| 221-282-501 | TRANSMISSION LINE, RF, 31.5″ |
| 221-282-502 | TRANSMISSION LINE, RF 30″ |
| 221-283-800 | RAIL SHIELD, CHAMBER, FRONT |
| 221-283-900 | RAIL SHIELD, CHAMBER, REAR |
| 221-288-900 | TABLE WATER TUBE ASSEMBLY, 44XX TYPE |
| 221-289-800 | BEARING, CHAMBER/LOAD LOCK DOOR F/T |
| 221-289-900 | RAIL BEARING |
| 221-290-000 | RAIL BEARING |
| 221-290-100 | BEARING, LL DOOR |
| 221-291-100 | TABLE DRAW BAR, LOWER |
| 221-292-600 | COUPLING, RAIL |
| 221-296-100 | TABLE WATER MANIFOLD |
| 221-297-300 | SHIELD, SPROCKET, RAIL DRIVE |
| 221-299-300 | SHIELD, RAIL IDLER |
| 221-305-000 | MAGNETRON ASSEMBLY, 8″ RF |
| 221-305-900 | UNIFORMITY SHAPER, 8″ RF DIODE |
| 221-306-000 | SEE 721-242-1000 |
| 221-310-200 | PALLET, MOLY, 4″ WAFERS, 14 STAGGERED |
| 221-313-000 | MAGNETRON ASSEMBLY, DELTA |
| 221-313-100-T | BACKING PLATE, DELTA,BOLT ON |
| 221-313-100-D | BACKING PLATE, DELTA,BOND-ON |
| 221-313-101 | BACKING PLATE, DELTA, BOND-ON |
| 221-313-200 | INSULATOR, DELTA, TEFLON |
| 221-313-201 | INSULATOR, DELTA, TEFLON, |
| 221-313-350 | MAGNET, DELTA |
| 221-313-600 | BLANK OFF, DELTA |
| 221-339-400 | TABLE SLEEVE BEARING, SHORT STEP |
| 221-339-401 | TABLE SLEEVE BEARING, LONG STEP |
| 221-339-402 | TABLE SLEEVE BEARING, TWO STEP |
| 221-340-900 | CONTACTS, SHUTTER/TABLE |
| 221-341-000 | GROUND STRAP, TABLE |
| 221-366-400 | SHUTTER, DELTA, FULL CIRCLE, 410 SS |
| 221-366-401 | SHUTTER, DELTA, FULL CIRCLE, 304 SS |
| 221-376-900 | INSULATOR, RF TRANSMISSION LINE |
| 221-381-100 | ANODE RING |
| 221-385-700 | GROUND DISH, 44XX TYPE |
| 221-386-000 | TABLE SHAFT, 44XX TYPE |
| 221-393-100 | CONDUCTOR ROD, TABLE SHAFT |
| 221-393-200 | TUBE GLAND, CONDUCTOR ROD |
| 221-393-300 | RF HORIZONTAL BAR |
| 221-405-800 | RF CONTACTS, MULTILAM |
| 221-405-801 | RF CONTACTS, TRANSMISSION CLAMP |
| 221-415-200 | INSULATOR, TABLE WATER TUBE SPACER |
| 221-433-000 | LOAD LOCK DOOR LINKAGE PIN |
| 221-433-400 | TABLE RF SHIELD |
| 221-435-700 | SHUTTER SHAFT, DELTA, VANE |
| 221-437-800 | SHUTTER CLAMP, DELTA, VANE |
| 221-437-810 | SHUTTER CLAMP, DELTA, CO-DEP |
| 221-439-300 | SHUTTER SHAFT, DELTA |
| 221-439-310 | SHUTTER SHAFT, DELTA, CO-DEP |
| 221-441-100 | TUBE GLAND, TRANSMISSION LINE |
| 221-442-500 | TRANSMISSION LINE, 28.5″ |
| 221-450-200 | SEE 943-0587-115 |
| 221-451-600 | PULLEY, TIM ING, R/L ASSY |
| 221-459-500 | ROTATION CONTROLLER |
| 221-465-600 | SHUTTER, ROUND, FULL CIRCLE, 410SS |
| 221-465-601 | SHUTTER, ROUND, FULL CIRCLE, 304SS |
| 221-465-610 | SHUTTER, CO-DEP, ROUND |
| 221-488-300 | SEE 221-491-800 |
| 221-491-800 | FEEDTHROUGH, IGNITER |
| 221-495-500 | PALLET, MOLY, BLANK |
| 221-530-100 | SHAPER, DELTA SHUTTER, SET |
| 221-542-800 | ADAPTER, DELTA TO 8″ ROUND |
| 221-543-600 | BLANK-OFF, 8″ |
| 221-580-100 | SHAPER WINGS, DELTA, SET |
| 221-590-500 | PALLET, MOLY, 4″ WAFERS, 18 WAFERS |
| 221-594-300 | SHUTTER, DELTA, VANE, MOLY |
| 221-594-301 | SHUTTER, DELTA, VANE, SS |
| 221-594-302 | SHUTTER, DELTA, VANE, SS, EDGES |
| 221-594-310 | SHUTTER CLAMP FOR 302 |
| 221-623-100 | SEE 300-200-050 |
| 221-623-200 | SEE 300-200-040 |
| 221-695-000 | SEE 300-200-030 |
| 221-703-300 | SHIELD, TABLE BLANK OFF |
| 221-714-200 | BEARING HOUSING, 44XX TYPE |
| 221-714-201 | BEARING HOUSING, 44XX TYPE, ASSY |
| 221-714-202 | BEARING HOUSING ,44XX TYPE |
| 221-769-900 | PALLET, MOLY, 5″ WAFERS, 9 WAFERS |
| 221-895-000 | SEE 300-200-030 |
| 221-949-810 | SHUTTER, ROUND, CO-DEP |
| 221-999-600 | SHUTTER, DELTA, CO-DEP, UPPER |
| 221-999-700 | SHUTTER, DELTA, CO-DEP, LOWER |
| 222-077-800 | SHUTTER SET, CO-DEP |
| 222-083-100 | POLE PIECES (INSERTS), DELTA |
| 222-083-101 | POLE PIECES (INSERTS), DELTA, OUTER |
| 222-083-102 | POLE PIECES (INSERTS), DELTA, INNER |
| 222-087-300 | SHAPER WINGS, DELTA, CO-DEP, SET |
| 222-220-900 | PALLET, MOLY, 4″ WAFERS, 13 WAFERS |
| 222-258-500 | GROUNDING ARMS |
| 220-945-100 | BOARD OUTPUT RELAY |
| 220-964-900 | HOIST BUSHING |
| 220-965-000 | HOIST KEY |
| 221-021-500 | ION, GAUGE TUBE ON 1.5″ CFF |
| 221-023-100 | HEAD PLATES MISC |
| 221-027-200 | HOIST BUSHING |
| 221-074-000 | BEARING, BALL, TABLE HOUSING SMALL |
| 221-079-800 | GUIDE, TRANSMISSION LINE |
| 221-079-900 | RF INSULATOR |
| 221-085-300 | PC BOARD DGC A2 |
| 221-086-100 | PC BOARD DGC A11 |
| 221-106-100 | SHAFT DRIVE FOR THRTL VALVE |
| 221-106-200 | SHAFT, CENTER |
| 221-106-600 | CRANK SHAFT THRTL VALVE |
| 221-106-700 | CRANK, TIE THROTTLE VALVE |
| 221-108-500 | BELLOWS, POPPET VALVE 2400 |
| 221-132-900 | AIR OPERATED VALVES 3/4″ |
| 221-142-000 | TOP COVER, DC MAG ASSY MK2 |
| 221-156-900 | MAGNET, OUTER CYLINDER |
| 221-177-600 | LN2 CONTROLLER |
| 221-209-800 | HEATER ASSY. |
| 221-210-000 | CLIP-HEATER ASSY |
| 221-213-600 | H2O FLOW SWITCHES |
| 221-214-200 | FLOW SWITCH ASSY. |
| 221-219-600 | THUMB SCREW 10-32 ALL CATHODES |
| 221-242-400 | END CAP TRANMISSSION LINE |
| 221-247-100 | SEAL PLATE WATER LINE |
| 221-249-300 | DC CATHODE ASSY |
| 221-249-600 | SUPPORT RING, DC MAG ASSY |
| 221-249-700 | CENTER POST, DC-MAGNET.MK2 |
| 221-249-800 | POLE PIECE-INNER, DC MAG |
| 221-251-300 | HOUSING & SPROCKET |
| 221-260-800 | BASEPLATE 4400 |
| 221-261-500 | SPROCKET, CHAMBER DRIVE WHEEL |
| 221-261-600 | DRIVE SHAFT, CHAMBER SPROCKET |
| 221-262-200 | RAIL ASSY. FRONT LOAD LOCK |
| 221-262-300 | IDLER SHAFT |
| 221-262-500 | SHAFT SPROCKETT |
| 221-263-000 | TEST BOX ASSY-RF GEN. |
| 221-263-700 | RAIL ASSY. REAR LOAD LOCK |
| 221-263-800 | DRIVE WHEEL AND SHAFT ASSY. |
| 221-263-900 | SPROCKET, LOAD LOCK DRIVE WHEEL |
| 221-264-000 | DRIVE SHAFT, LOAD LOCK SPROCKET |
| 221-270-900 | CHAMBER |
| 221-272-800 | TUBE WELDMENT TABLE |
| 221-272-900 | COOLING TUBE & TABLE ASSY. |
| 221-275-001 | DOOR- SS LOAD LOCK |
| 221-275-200/300 | LOCK VALVE GUIDE FRONT |
| 221-275-600 | LINKAGE, GROOVE JOINT |
| 221-276-000 | PIN LOCK VALVE |
| 221-276-500 | TABLE RF SHIELDING |
| 221-279-000 | WASHER, LOCK VALVE |
| 221-280-300 | REAR PLATE ASSY. |
| 221-281-100 | ELEVATOR SHAFT |
| 221-283-400 | CHAMBER CLAMP |
| 221-284-201 | BASE PLATE BLANK OFF |
| 221-286-500 | MOTOR, MODIFIED |
| 221-286-600 | GEAR REDUCER-MOD |
| 221-286-900 | SHAFT DRIVE ASSY |
| 221-290-300 | COVER, GUIDE TABLE UP/DOWN |
| 221-290-800 | CAM, TABLE POSITION |
| 221-299-400 | SHEILD BEARING RAIL |
| 221-300-500 | FEED THRU PLATE MIESSNER |
| 221-300-501 | PORT BLANK OFF MIESSNER |
| 221-302-100 | DRIVE PIN |
| 221-305-300 | VERTICAL SHEILD |
| 221-305-310 | VERTICLE SHEILDS |
| 221-305-400 | HORIZONTAL SHEILD |
| 221-309-300 | TARGET PLATE, BACKING 6″ RF CATHODE |
| 221-313-400 | POLE PIECE INNER DELTA CATHODE |
| 221-313-500 | POLE PIECE OUTER DELTA CATHODE |
| 221-317-900 | PC BOARD TABLE UP DOWN |
| 221-337-200 | BAR ANTI ROT. WATER LINE |
| 221-338-200 | SHIPPING CLAMP 8″ RF MAGNETRON |
| 221-362-100 | PLATE MAGNET ASSY DELTA CATHODE |
| 221-362-300 | POLE PIECE 1 HOLE DELTA CATHODE |
| 221-364-800 | BLOCK GLAND |
| 221-365-400 | CLAMP OUTER SHAFT |
| 221-365-410 | SUB-ASSEMBLY SPACER |
| 221-368-200 | MEISSNER COILS |
| 221-370-800 | PC BOARD DGC A8 |
| 221-370-900 | PC BOARD DGC A9 |
| 221-371-000 | PC BOARD DGC A10 |
| 221-371-100 | BOARD DGC MOTHER |
| 221-371-500 | PC BOARD DGC A5 |
| 221-371-600 | PC BOARD DGC A6 |
| 221-371-700 | PC BOARD DGC A7 |
| 221-373-500 | LONG LEAD SCREW |
| 221-380-700 | POLE PIECE 2 HOLE DELTA CATHODE |
| 221-380-800 | MAGNET 1 HOLE DELTA CATHODE |
| 221-384-000 | SCREEN |
| 221-386-300 | STANDOFF GND SHIELD 4400 |
| 221-389-600 | TABLE FEED THRU COLLAR |
| 221-389-800 | TABLE SHAFT COLLAR |
| 221-389-900 | SCREW, MODIFIED, SLEEVE ASSY |
| 221-390-800 | JACK SCREW |
| 221-405-700 | RF CONDUCTOR BAR INSULATOR |
| 221-436-400 | RULON BUSHING, SHAFT SMALL SHUTTER |
| 221-437-500 | SHAFT OUTER, SUB ASSY. |
| 221-439-200 | SPACER, 4410 HEAD |
| 221-441-300 | TOP PLATE SHIELD A |
| 221-441-301 | TOP PLATE SHEILD B |
| 221-441-302 | TOP PLATE SHEILD C |
| 221-441-303 | SCREW SET |
| 221-445-100 | POWER SUPPLY, DC MAGNETRON |
| 221-463-200 | HEATER ASSY DELTA CATHODE |
| 221-465-042 | SMALL HOLE COVERS |
| 221-465-043 | LARGE HOLE COVERS |
| 221-465-700 | HUB, MAIN SHUTTER |
| 221-479-100 | 4410 SERVO MATCH CONTROL |
| 221-483-600 | SET NUT 1 HOLE DELTA CATHODE |
| 221-485-800 | ANODE RING 8″ DC |
| 221-502-300 | CROSS CONTAMINATION SHEILD |
| 221-505-100 | TOP PLATE SHEILD-NEW |
| 221-509-201 | VALVE PORT ADAPTER THROTTLE |
| 221-524-800 | BUSHING RULON |
| 221-587-500 | KIT HARDWARE DELTA CATHODE, BOLT ON |
| 221-608-500 | EMISSION CONTROL BOARD |
| 221-623-400 | DELTA TO 8″ SHAPER |
| 221-623-420 | ADAPTOR DELTA TO 8″ CATHODE |
| 221-656-900 | HEATER ASSY. LOAD LOCK |
| 221-660-100 | SWITCHES HOIST UP DOWN |
| 221-667-000 | KIT BLANK OFF ASSY |
| 221-711-200 | COVER, SWITCH HOIST |
| 221-714-400 | BEARING HOUSING, TABLE, NEW |
| 221-764-810 | BASE PLATE SCREENS 1 1/2″ |
| 221-917-000 | ROUGHING LINE FILTER |
| 221-964-700 | HEAD FRONT PANEL |
| 221-964-900 | HOIST BUSHING |
| 2400 14S*? | INSULATOR TABLE |
| 2400-14-100 | LOWER BLOCK, DELRIN |
| 2400-14-200 | LOWER TUBE |
| 2400-14-300 | MIDDLE BLOCK, DELRIN |
| 2400-14-400 | RF WATER LINE |
| 2400-14-500 | GEAR DRIVE ASSY. AND PARTS |
| 2400-14-600 | BEARING, WATER LINE |
| 2400-14-650 | BEARING TABLE SUPPORT |
| 2400-14-675 | WAVE WASHER |
| 2400-14-700 | ROTARY UNION |
| 2400-14-800 | TABLE WELDMENT |
| 2400-14-900 | GEAR |
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
[contact-form-7 404 "Not Found"]
PLEASE CONTACT US IF YOU NEED PERKIN-ELMER SPUTTERING SYSTEM SPARE PARTS.
Allwin21 Corp. has been focusing on providing solutions and enhancements to Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480 used sputter deposition semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC and new critical components. We rebuild AccuSputter AW 4450 Series Sputter Deposition systems with our own integrated process control system, giving our customers the tools to achieve a production edge at very low cost impact.
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 6 inch | Wafer loading: Manually, with load lock | Cathodes: Circle Shape/4″~6″/Up to 4 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small~8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 4480 Sputter
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: 4~ 6 inch | Wafer loading: Automatic, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 44XX Upgrade Kits
The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original PE sputter system.
Perkin-Elmer Sputter, Perkin-Elmer Sputter Desposion,Perkin-Elmer 4400,Perkin-Elmer 4410,Perkin-Elmer 4450,Perkin-Elmer 4480,Perkin-Elmer 2400,Perkin-Elmer Sputter Deposition System,Perkin-Elmer
