Product Description
Perkin-Elmer Sputter Spare Parts
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
| 120-019-000 | O-RING, LOAD LOCK ELEVATOR |
| 120-022-000 | O-RING, RAIL FEEDTHROUGH |
| 120-108-000 | RETAINING RING, RAILS |
| 120-110-000 | RETAINING RING, RAIL BEARING |
| 120-121-000 | O-RING, BEARING HOUSING |
| 120-162-000 | O-RING, LOAD LOCK DOOR LINKAGE F/T |
| 120-296-000 | RETAINING RING, RF CATHODE |
| 120-468-000 | RETAINING RING,RAIL DRIVE WHEEL |
| 120-862-000 | VALVE, VENT/GAS/PURGE |
| 121-124-900 | SPACERS, 1/4 x 1/4 |
| 121-165-000 | RETAINING RING, RAISE/LOWER |
| 121-250-000 | ROLL PIN, RAIL DRIVE |
| 121-392-600 | O-RING, RF INSULATOR |
| 121-393-700 | MOTOR, SHUTTER |
| 121-393-800 | MOTOR, LOAD |
| 121-393-900 | MOTOR, TUNE, 2400 |
| 121-394-300 | O-RING, TABLE WATER MANIFOLD, RAIL F/T |
| 121-394-500 | O-RING, WATER TUBE INSULATOR |
| 121-395-900 | O-RING, BEARING HOUSING |
| 121-398-400 | O-RING, CHAMBER TOP FLANGE |
| 121-400-400 | PULLEY |
| 121-403-600 | RETAINING RING, RAISE/LOWER |
| 121-411-600 | BEARING, SHUTTER, ROUND |
| 121-411-800 | BEARING, TABLE CONDUCTOR ROD |
| 121-420-400 | O-RING, LN2 RESERVOIR |
| 121-420-600 | RETAINING RING, RAISE/LOWER |
| 121-421-200 | MOTOR, TABLE ROTATION, STANDARD |
| 121-423-900 | O-RING, HIVAC VALVE, THROTTLE (?) |
| 121-424-300 | DOWEL PIN, INCLUDED IN 300-900-000 |
| 121-425-400 | BEARING, BEARING HOUSING |
| 121-425-700 | RETAINING RING, BEARING HOUSING |
| 121-430-000 | RETAINING RING, RAISE/LOWER |
| 121-430-800 | BEARING, RAISE/LOWER, COLLAR |
| 121-432-400 | RETAINING RING, BEARING HOUSING ASSY |
| 121-951-400 | HEATER LAMPS, 115 VAC |
| 121-964-940 | BELT, HOIST |
| 122-012-000 | RETAINING RING, RAIL IDLER |
| 122-013-800 | FAN AND MOTOR, RF GENERATOR |
| 122-019-000 | RF PART, GENERATOR |
| 122-027-600 | INDUCTOR, RF GENERATOR |
| 122-042-000 | RETAINING RING, INCLUDED IN 300-500-110 |
| 122-048-500 | MOTOR, LOAD LOCK LID |
| 122-074-400 | VALVE, LN2, 24VAC |
| 122-074-500 | SWITCH, RF ON/OFF |
| 122-095-800 | O-RING, F/T RAIL DRIVE |
| 122-096-600 | SEE 121-421-200 |
| 122-098-300 | PUSHBUTTON, APC, LLC |
| 122-127-700 | TIMING BELT, STANDARD ROTATION |
| 122-140-600 | BEARING, THRUST (SPACER) SSR6 |
| 122-140-900 | CHAIN AND LINK, CHAMBER RAIL |
| 122-140-901 | CHAIN AND LINK, LOAD LOCK RAIL |
| 122-141-000 | CHAIN CONNECTION LINK |
| 122-145-600 | SEE 940-6185-001 |
| 122-148-500 | TIMING BELT, PRECISION ROTATION, OLD |
| 122-148-501 | TIMING BELT, PRECISION ROTATION, NEW |
| 122-149-900 | O-RING, CHAMBER/LOAD LOCK DOOR |
| 122-150-000 | O-RING, LOAD LOCK LID |
| 122-153-700 | VIEW PORT PROTECTIVE GLASS |
| 122-160-300 | INCLUDED IN 300-500-200 |
| 122-168-900 | SWITCH, MICRO, LL LID |
| 122-181-500 | LOAD LOCK DOOR ACTUATOR LINKAGE |
| 122-198-100 | RETAINING RING, RF TRANSMISSION LINE |
| 122-204-100 | MAGNET, 8″ |
| 122-218-100 | PULLEY, TIMING, R/L ASSY |
| 122-218-300 | TIMING BELT, RAISE/LOWER |
| 122-245-600 | RELAYS, R10-E2-L1 |
| 122-268-400 | CAPACITOR, SPUTTER HEAD |
| 122-281-700 | O-RING, LOAD LOCK DOOR LINKAGE F/T |
| 122-283-790 | SWITCH, TUNE/LOAD |
| 122-288-730 | MOTOR, HOIST |
| 122-296-660 | BEARING, THRUST, (SPACER) SSR4 |
| 122-296-760 | RELAY, VACUUM, 110VDC |
| 122-302-160 | SEE 221-405-800 |
| 122-309-170 | PUSHBUTTON |
| 133-272-200 | CAPACITOR, 50 PF |
| 133-272-300 | CAPACITOR, 100 PF |
| 134-021-200 | POTENTIOMETER, RF POWER ADJUST |
| 135-441-900 | SWITCH, MODE SELECTOR |
| 135-442-900 | SWITCH AND ACTUATOR, TABLE ROTATION |
| 135-444-200 | SWITCH, HEAD PANEL INTERLOCK |
| 135-445-000 | SWITCH |
| 135-445-300 | SWITCH, TARGET SELECTOR, DOUBLE DECK |
| 135-445-400 | SEE 300-500-300 |
| 135-928-200 | RELAY, SERVOMATCH |
| 136-159-100 | RECTIFIER, BRIDGE, HEAD, RF GENERATOR |
| 140-245-700 | SWITCH, BEARING HOUSING, TBL UP/DOWN |
| 140-245-701 | SWITCH ATCUATOR |
| 145-003-300 | TUBE, EXITER |
| 145-005-600 | TUBE, RF GENERATOR |
| 145-006-500 | TUBE, RF GENERATOR |
| 145-006-600 | TUBE, RF GENERATOR |
| 178-095-000 | O-RING, WATER TUBE |
| 178-137-000 | CAPACITOR, POWER SPLIT, — USED |
| 179-747-000 | LAMPS, SET OF 5 |
| 120-108-000 | SNAP RING, OUTSIDE 3/8″ |
| 120-110-000 | SNAP RING, INSIDE 7/8″ |
| 120-121-000 | O-RING, VITON. 1.4841.D. |
| 120-296-000 | RETAINING RING 8″ RF CATHODE |
| 120-889-000 | RETAINING RING 6″ RF CATHODE |
| 120-904-000 | O-RING #112 B 6″ RF CATHODE |
| 121-261-000 | BELLVILLE WASHER, LOCK VALVE |
| 121-392-300 | O-RING #252 B 8″ RF CATHODE |
| 121-395-300 | O-RING #210 B 8″ RF CATHODE |
| 121-396-300 | O-RING #261 V 6″ RF CATHODE |
| 121-396-700 | O RING 266V 8″ DC CATHODE |
| 121-396-900 | O RING #268V 8″ RF CATHODE |
| 121-397-000 | O RING 269V 8″ DC CATHODE |
| 121-399-300 | BOX, GEAR, 1 REDUCER |
| 121-399-400 | GEAR BOX, RIGHT ANGLE, SHUTTER |
| 121-399-500 | WORM DRIVE |
| 121-401-400 | BELT, TIMING 2400 TABLE UP/DOWN |
| 121-411-500 | BEARING SUPPORT |
| 121-412-400 | BEARING |
| 121-412-500 | BEARING,SUPPORT,SHAFT,PI |
| 121-413-000 | COUPLER SHAFT, 3/16 X 3/16 |
| 121-418-000 | TUBE FITTING 8″ RF CATHODE |
| 121-421-300 | PULLEY, 10XL80-37 BORED 1/4 |
| 121-421-500 | BEARING SUPPORT SHAFT, PI |
| 121-424-000 | O RING DELTA CATHODE #278V |
| 121-428-000 | O-RING #230 V 6″ RF CATHODE |
| 121-431-400 | RETAINING RING EXT. 2″ |
| 121-951-800 | COW MAGNET |
| 121-958-900 | COUPLER SHAFT, 1/4 |
| 121-965-070 | NUT HOIST |
| 121-991-900 | SPROCKET, BOSTON HK 2520-1 |
| 121-992-600 | GASKET 1.5 INCH PKG. OF 10 |
| 121-992-700 | GASKET 2 INCH PKG. OF 10 |
| 122-058-800 | SOLENOID VALVE 4-WAY |
| 122-072-300 | SOLONOID, VENT |
| 122-074-555 | SWITCH, RFALT, ACTION ON-OFF |
| 122-099-000 | METER SCALE |
| 122-118-000 | STANDOFF, 1/2 HEX X 2.5″ 8″ DC CATHODE |
| 122-118-100 | ELBOW 1/4 POLY 8″ RF MAGNETRON |
| 122-121-900 | SCREW 6-32 X 1/4 PHIL PAN VENTED |
| 122-139-400 | PIPE NIPPLE 1/4 NPT X 3 8″ DC CATHODE |
| 122-140-200 | O RING 8″ DC CATHODE #228B |
| 122-141-600 | RETAINING RING OUTSIDE 3/8″ |
| 122-142-100 | SHAFT SPACER |
| 122-145-500 | CYLINDER LOAD LOCK VALVE |
| 122-148-300 | PULLEY, ROTATION MOTOR |
| 122-149-100 | SHAFT COLLAR |
| 122-154-200 | MOTOR SLOW SYN STEPPING CAP DRIVE |
| 122-164-100 | PALLET T HANDLE |
| 122-164-500 | MOTOR, ELECT., GEARMOTOR CAP |
| 122-164-800 | CYLINDER |
| 122-164-900 | STANDOFF 1/2 HEX 1.5″ 8″ RF MAGNETRON |
| 122-165-000 | PIPE NIPPLE 1/8 MPT X 2″ 8″ RF MAGNETRON |
| 122-165-800 | ROLL PIN, 1/8 X 1 |
| 122-167-700 | CAP.,CERAMIC,50V |
| 122-184-200 | RESERVOIR, OIL, 1 0Z |
| 122-203-200 | TRANSFORMER, LL AND APC |
| 122-232-800 | INDUCTOR, SHEILDED,10UH,MINI |
| 122-265-400 | BEARING THRUST NEEDLE |
| 122-267-400 | THRUST RACE,LARGE BEARING |
| 122-267-500 | BEARING WASHER THRUST |
| 122-267-600 | BEARING THRUST NEEDLE |
| 122-271-200 | RELAY TIME DELAY 1.8-180 SEC |
| 122-277-200 | SPEED CONTROLLER |
| 122-282-560 | ACTURATOR, ARM ROLLER |
| 122-282-570 | SWITCH MAIN SHUTTER |
| 122-283-780 | CHOKE, RF, 10UH.1.5A 5% |
| 122-286-520 | RELAY, TIME DELAY TABLE UP/DOWN |
| 122-286-560 | RELAY, 12 VDC, 5A DPDT |
| 122-287-420 | SCALE, METER TABLE SPACING |
| 122-288-270 | SWITCH TARGET SELECT |
| 122-288-300 | WASHER .565 X .25 X .008 SST |
| 122-290-080 | TEMP. CONTROLLERS |
| 122-304-100 | SCALE METER TABLE BIAS |
| 122-314-480 | CAPACITOR 10-100PF |
| 132-509-300 | RELAY, TIME DELAY, 10 AOUTLEY, 115V |
| 133-242-100 | CAP, .005MF, 1KV, CERAMIC |
| 133-271-900 | CAP . .01 MFD |
| 133-272-400 | CAP, 25PF, 15KVDC |
| 133-273-100 | CAP 10-300 PF 7.5 KV |
| 133-273-500 | CAP, 200 PF 15-KVDC |
| 134-082-400 | RESISTOR, 250 OHM 20 W |
| 134-571-200 | SERVO POT LOAD COIL |
| 134-571-300 | POTENTIOMETER, 1.02K + 200HM, -150 |
| 135-024-000 | SWITCH, HOIST CONTROL |
| 135-441-700 | SWITCH PA1003 SHUTTER |
| 135-443-100 | ARM ACTUATOR, MICRO SWITCH |
| 135-444-400 | SWITCH CARRIER POSITION |
| 135-445-500 | RF CONTRACTOR WIPER |
| 135-921-200 | CAP.,.005MF,1KV, CERAMIC |
| 135-922-500 | SWITCH, MICRO, DPDT |
| 136-161-100 | HIVOLTAGE RECTIFIERS |
| 137-061-700 | METER , SIMPSON, 0-25 Ua |
| 137-061-800 | METER, SIMPSON, 0-500 VDC |
| 145-003-200 | TUBE, RF POWER |
| 148-146-000 | MOTOR SHUTTER |
| 172-176-000 | SOC. CAP SCREW 1/4-20 X .5 8″ CATHODE DC |
| 176-614-000 | SCREW MAGNET PHIL. CATHODE |
| 176-661-000 | SCREW MAGNET PLATE CATHODE |
| 178-055-000 | SCREW 1/4-20 X 1/2 NYLON |
| 179-013-000 | SCREW 1/4-20 X 1.5 8″ DC CATHODE |
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
[contact-form-7 404 "Not Found"]
PLEASE CONTACT US IF YOU NEED PERKIN-ELMER SPUTTERING SYSTEM SPARE PARTS.
Allwin21 Corp. has been focusing on providing solutions and enhancements to Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480 used sputter deposition semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC and new critical components. We rebuild AccuSputter AW 4450 Series Sputter Deposition systems with our own integrated process control system, giving our customers the tools to achieve a production edge at very low cost impact.
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 6 inch | Wafer loading: Manually, with load lock | Cathodes: Circle Shape/4″~6″/Up to 4 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small~8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 4480 Sputter
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: 4~ 6 inch | Wafer loading: Automatic, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 44XX Upgrade Kits
The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original PE sputter system.
Perkin-Elmer Sputter, Perkin-Elmer Sputter Desposion,Perkin-Elmer 4400,Perkin-Elmer 4410,Perkin-Elmer 4450,Perkin-Elmer 4480,Perkin-Elmer 2400,Perkin-Elmer Sputter Deposition System,Perkin-Elmer
