Product Description
Perkin-Elmer Spare Parts
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| 300-100-010 | SHAPER MOUNTING KIT, 8″ |
| 300-100-015 | SHAPER MOUNTING KIT, DELTA “ |
| 300-100-020 | DELTA TARGET MOUNTING KIT |
| 300-100-030 | HARDWARE KIT, 8″ RF |
| 300-100-040 | HARDWARE KIT, 8″ DC |
| 300-200-000 | MAGNET ASSEMBLY, DELTA |
| 300-200-001 | MAGNET PLATE, DELTA |
| 300-200-003 | MAGNETS, DELTA |
| 300-200-004 | MAGNETS, DELTA, SUPER STRONG |
| 300-200-005 | MAGNET ASSEMBLY, DELTA, SUPER STRONG |
| 300-200-006 | MAGNET ASSEMBLY REFURBISHING |
| 300-200-010 | UNIFORMITY SHAPER, DELTA/ROUND, DCM |
| 300-200-020 | UNIFORMITY SHAPER, DELTA/ROUND, RFM |
| 300-200-030 | UNIFORMITY SHAPER, DELTA/ROUND, RFD |
| 300-200-040 | DARK SPACE SHIELD, DELTA/ROUND 8″ |
| 300-200-050 | GROUND RING, DELTA/ROUND 8″ |
| 300-200-090 | HARDWARE / O-RING KIT, DELTA |
| 300-200-100 | BACKING PLATE REFURBISHING |
| 300-200-110 | ANODE RING REFURBISHING |
| 300-300-000 | UNIFORMITY SHAPER, DELTA, BAT WING |
| 300-300-100 | SHUTTER CLAMP, ROUND, VANE |
| 300-300-110 | SHUTTER ARM, ROUND, VANE |
| 300-400-000 | SHIELD SET, DELTA |
| 300-400-010 | SHIELD SET, ROUND |
| 300-400-020 | SHIELD, DELTA TOP PLATE, SET |
| 300-400-030 | SHIELD, TOP FLANGE |
| 300-400-040 | SHIELD, VERTICAL |
| 300-400-050 | SHIELD, HORIZONTAL, SET |
| 300-400-060 | SHIELD, 4400 TOP PLATE, 3-HOLE |
| 300-400-065 | SHIELD, 4400 TOP PLATE, 4-HOLE |
| 300-500-090 | FEEDTHROUGH ASSY, RAIL DRIVE |
| 300-500-101 | BEARING KIT, TRANSPORT RAILS |
| 300-500-102 | SEE 221-289-900 |
| 300-500-110 | RAIL, IDLER KIT |
| 300-500-111 | RAIL, DRIVE ROD |
| 300-500-120 | SHUTTER F/T ASSY, 2400/4400 |
| 300-500-130 | GEARBOX, 4400 VANE SHUTTER |
| 300-500-200 | LOAD LOCK DOOR LINKAGE |
| 300-500-300 | BIMBA REED SWITCH |
| 300-500-400 | RAILS, PALLET CARRIER, SET |
| 300-600-000 | PALLET, MOLY, TWEEZER GROOVE |
| 300-600-010 | PALLET, MOLY, 4″ WAFERS, 12 WAFERS |
| 300-600-015 | PALLET, MOLY, 4″ WAFERS, 13 WAFERS |
| 300-600-020 | PALLET, MOLY, 4″ WAFERS, 14 IN-LINE |
| 300-600-030 | PALLET, MOLY, 4″ WAFERS, 22 WAFERS |
| 300-600-040 | PALLET, MOLY, 3″ WAFERS, 30 WAFERS |
| 300-600-050 | PALLET, MOLY, 8″ WAFERS, 5 WAFERS |
| 300-600-060 | PALLET, MOLY, 6″ WAFERS, 6 WAFERS |
| 300-600-070 | PALLET, MOLY, 6″ WAFERS, 8 WAFERS |
| 300-600-071 | PALLET, MOLY, 6″ WAFERS, 8 WAFERS |
| 300-600-075 | PALLET, MOLY, 6″ WAFERS, 8 WAFERS,Backside Sputtering |
| 300-700-000 | GEARBOX, TUNE CAP, 4400 TYPE |
| 300-700-010 | TABLE GROUND DISH, 2400 TYPE |
| 300-700-100 | CONDUCTOR ROD, TABLE, FERROFLUIDICS |
| 300-710-100 | TABLE ROTATION MOTOR, PRECISION |
| 300-750-000 | J ARM ASSEMBLY, 6″ SYSTEM |
| 300-800-000 | RELAY, VACUUM, 24 VDC |
| 300-800-020 | POWER TUBE, RF GENERATOR |
| 300-800-030 | IGNITER F/T, 4450 STYLE |
| 300-900-000 | BEARING KIT, CHAMBER/LOAD LOCK DOOR |
| 300-900-030 | BELLOWS, CRYO FORELINE VALVE |
| 300-900-040 | BEARING KIT, SHUTTER |
| 300-900-300 | HEATER SYSTEM, LOAD LOCK |
| 300-900-310 | HEATER ELEMENT, LOAD LOCK |
| 300-900-311 | HEATER ELEMENT FEEDTHROUGHS |
| 300-900-312 | HEATER ELEMENT F/T SEAL, BAG OF 5 |
| 300-900-320 | HEATER SHIELD, INNER |
| 300-900-330 | HEATER T/C |
| 300-900-331 | HEATER T/C FEEDTHROUGH |
| 300-900-332 | HEATER T/C F/T SEAL |
| 300-900-400 | ION GAUGE CONTROLLER |
| 300-900-700 | MICRO SWITCH, TABLE, SHUTTER |
| 310-204-1010 | PRESSURE SWITCH, UP TO AIR |
| 320-000-010 | O-RING, DELTA INSULATOR |
| 320-000-020 | O-RING, LOAD LOCK ELEVATOR |
| 320-000-070 | O-RING KIT, TABLE |
| 320-100-010 | O-RING KIT, 8″ DC MAGNETRON |
| 320-100-020 | O-RING KIT, 8″ RF CATHODE |
| 320-100-030 | O-RING KIT, SHUTTER, ROUND |
| 320-100-040 | O-RING KIT, SHUTTER, DELTA |
| 320-100-050 | O-RING KIT, LOAD LOCK |
| 321-100-000 | O-RING, 8″ BLANK OFF |
| 321-100-000 | O-RING, 8″ BLANK OFF |
| 321-100-010 | O-RING, HIVAC VALVE ACTUATOR |
| 321-100-010 | O-RING, HIVAC VALVE ACTUATOR |
| 310-204-010 | SWITCH, PRESSURE, J40 |
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PLEASE CONTACT US IF YOU NEED PERKIN-ELMER SPUTTERING SYSTEM SPARE PARTS.
Allwin21 Corp. has been focusing on providing solutions and enhancements to Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480 used sputter deposition semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC and new critical components. We rebuild AccuSputter AW 4450 Series Sputter Deposition systems with our own integrated process control system, giving our customers the tools to achieve a production edge at very low cost impact.
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 6 inch | Wafer loading: Manually, with load lock | Cathodes: Circle Shape/4″~6″/Up to 4 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small~8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 8 inch | Wafer loading: Manually, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 4480 Sputter
Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: 4~ 6 inch | Wafer loading: Automatic, with load lock | Cathodes: Delta Shape/Up to 3 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range
Perkin-Elmer 44XX Upgrade Kits
The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original PE sputter system.
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