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AccuThermo AW 410 Spare Parts

AccuThermo AW 410 Spare Parts

Category:

Product Description

Item

P/N

Description

Qty
AccuThermo AW 410 Spare Parts Kit, Level 1 

1

 2451-0003-01   Lamp, 1500W 208V

5

2

 2504-0070 O-Ring, Purge Inlet

2

3

 A5-0202 O-Ring, Flange to Tube,Door to Flange

4

4

 5101-0030 Fuse,1A 250V,Fst-Blo

2

5

 5101-0090 Fuse,1/2A 250V,Fst-Blo

2

6

 5101-0110 Fuse,5A 250V,Fst-Blo

2
AccuThermo AW 410 Spare Parts Kit, Level 2 

7

 2109-0050 Lampholder,Tung Halg,10A 600V

2

8

 5108-0010 Water Interlock Switch N.O.

1

9

 4502-0050 Valve Solenoid,NC=2 Way1/4″

1

10

 2901-0040 Digital Panel Meter Assy

1

11

 5107-0010 Door Interlock Switch

1

12

 5107-0020 Cabinet Interlock

1

13

 5300-0060 Thermstat Interlock “A”

1

14

 5300-0070 Thermstat overcool “B”

1

15

 5300-0090 ThermstatOpen=150F CL=135F

1

16

 7100-0326-01-AW TC ASSEMBLY, T-SHAPE, QUARTZ      

1

17

 7100-0874-11 ERP Pyro, Water Cooled

1

18

 2100-0900-058 PCA, Main Control Board

1

19

 2100-0900-038 PCA, Oven Control Board

1

20

 2100-0900-054 PCA, Gas Control Board

1
AccuThermo AW 410 Spare Parts Kit, Level 3

21

 4501-0050-3 Contactor, 3 Pole

1

22

 5103-0010 Rocker Switch, DPDT 5A

1

23

 7100-0198-01 Leak Assy

1

24

 4803-0010 SCR Dual Pair,90A, 600V

2

25

 A5-0206        Circuit Breaker, 3 pole, 50A

1

26

 A4-0030-01     Quartz Isolation Tube with pyrometer window

1

27

 A4-0032-01 Quartz tray for 2 to 5 inch wafers.

1